Hexapod 6-Axis Stages: High Performance 6-DOF Precision Positioning Systems & Motion Platforms

Hexapods, 6-axis positioning stages, are based on parallel kinematics, and often referred to as Stewart Platforms. A hexapod positioning system is based on a 6-axis actuator system (XYZ, Pitch, Roll, Yaw) arranged in parallel between a top and bottom platform. PI's parallel kinematics (PKM) multi-axis precision positioning systems have many advantages over conventional serial kinematics stages, including lower inertia, improved dynamics, smaller package size, and higher stiffness. The user-programmable pivot point – integral to all PI high-performance hexapod multi-axis motion controllers – provides additional benefits, especially in alignment applications of lenses, optics, and fiber optic components. Watch a short pivot-point demo video.

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Product Finder - Air Bearing Stages

6-Axis Robotics, Hexapods

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15 results


PIglide RB Linear Air Bearing Module

A-10x PIglide RB Linear Air Bearing Module

Friction Free, Ideal for Positioning, Scanning, Metrology
  • High-resolution positioning
  • Friction-free & clean room compatible
  • Motion platform 300mm × 300mm
  • Load capacity 775kg
  • Travel ranges up to 1m

A-110 PIglide LC Linear Stage with Air Bearings

Inexpensive High Performance Nanopositioning Stage
  • High precision positioning
  • Inexpensive & clean room compatible
  • Motion platform 160mm × 200mm
  • Travel ranges up to 400mm
  • Load capacity up to 100N

A-121 PIglide AT1 Linear Stage with Air Bearings

High Performance Small Footprint Nanopositioning Stage
  • High performance nanopositioning stage
  • small design
  • Motion platform 115mm × 115mm
  • Travel ranges up to 350mm
  • Resolution up to 1nm

A-123 PIglide AT3 Linear Stage with Air Bearings

High Performance Nanopositioning Stage
  • High performance nanopositioning stage
  • Clean room compatible
  • Motion platform 210mm × 210mm
  • Travel ranges 50mm to 750mm
  • Resolution up to 1 nm

A-131 PIglide VC Voice Coil Linear Stage with Air Bearings

High-Performance Miniature Nanopositioning System
  • Miniature nanopositioning system
  • Clean room compatible
  • Travel ranges up to 25mm
  • Load capacity up to 30N
  • Acceleration up to 40m/s

A-141 PIglide MB Miniature Linear Stage with Air Bearings

High Performance, Cleanroom Compatible, Customizable
  • High performance
  • Clean room compatible
  • Motion platform 57mm × 93mm
  • Travel ranges up to 35mm
  • Acceleration up to 3,5m/s
A-142 Miniature Air Bearing Linear Stage
NEW

A-142 PIglide Voice Coil Linear Stage with Air Bearings

High Performance • Cleanroom-Compatible • Option for Vertical Mounting
  • High performance
  • Possible vertical mounting
  • Motion platform 75mm × 80mm
  • Travel ranges up to 10mm
  • Load capacity to 3kg
NEW

A-143 PIglide Miniature Linear Air Bearing Stage

High Performance • Cleanroom-Compatible • Option for Vertical Mounting
  • High performance
  • Cleanroom compatible
  • Possible vertical mounting
  • Motion platform 85mm × 75mm
  • Travel range 25mm
  • Load capacity to 4kg

A-311 PIglide IS Planar Scanner with Air Bearing

High-Performance, Compact XY Nanopositioning System
  • Compact XY-nanopositioning system
  • High-precision positioning
  • Low profile
  • Travel ranges up to 300mm × 400mm
  • Load capacity up to 147N

A-322 PIglide HS Planar Scanner with Air Bearing

XY Positioning System with 1 nm Resolution
  • XY air bearing stage, planar, high performance, travel to 1 m, linear motors, absolute encoder, nanometer precision. For high accuracy automation & metrology.
PIglide RT Rotary Air Bearing Module

A-60x PIglide RT Rotary Air Bearing Module

Frictionless, Nonmotorized
  • Frictionless, non-motorized
  • Motion platform 50mm to 300mm
  • High load capacity up to 425kg
  • Eccentricity/flatness <200nm
  • mounted vertically or horizontally
PIglide Manual XY Tip/Tilt Platform

A-60x.MTT PIglide Manual XY Tip/Tilt Platform

Compatible with A-60x and A-62x
  • Add-On For Rotary Stage
  • 4 degrees of freedom
  • Travel range to ±3mm, ±1.25°
  • Direct mount on A-60x / A-62x
  • Manual operation

A-62x PIglide RM Rotation Stage with Air Bearings

Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology
  • Friction-Free
  • Motion platform 50mm to 300mm
  • Load capacity up to 4170N
  • Eccentricity/flatness &lt
  • 200nm
  • mounted vertically or horizontally

A-65x PIglide HB: Hemispherical Air Bearing Module

Friction-Free, Ideal for Rotational Motion on Three Axes
  • Ideal for Rotational Motion
  • Rotatable in three directions
  • Low inertia
  • Load capacity up to 635kg
  • tip/tilt range to ±45°
PIglide RLA Rotation Stage with Air Bearings, Large Aperture
NEW

A-68x PIglide RLA Rotation Stage with Air Bearings, Large Aperture

Friction-free, Motorized
  • Friction-free, motorized
  • ⌀365mm motion platform
  • ⌀260 mm aperture
  • Eccentricity/flatness &lt
  • 300nm

With three decades of Hexapod six-axis stage design and manufacturing experience, PI electro-mechanical hexapods and piezo hexapod positioners are the most advanced multi- axis precision positioning systems in the world, providing significantly higher precision than hydraulically driven systems. They are available in many sizes, and configurations for loads from 2 kg to more than 2000 kg, and most are self locking.

In addition to classical "Stewart Platform" type hexapods, PI also offers alternative parallel positioners, such as the SpaceFAB 6DOF Motion Platform design, which allows for longer linear travel ranges with a lower profile.

Controller and Software
PI hexapods are operated by dedicated, state-of-the-art vector motion controllers with virtual pivot point capability. An extensive software package including alignment algorithms e.g. for fiber optics etc, as well as simulation tools are included.

Vacuum and Atmospheric Version
Many of our hexapods and parallel positioners are available in vacuum versions, some for UHV levels to 10-9 Torr.

High-Speed / Dynamics Hexapod Platforms for Motion & Vibration Simulation
PI provides several solutions, with brushless motors and voice-coil linear motor direct drives. Watch video of highly dynamic, linear-motor hexapod platform.

 

Book a Hexapod Demo

In-person or Virtual

See how easy it is to get started with the H-811 hexapod and PI software.

Miniature High Precision Hexapod 6-Axis Stages with Electromagnetic Motors and Precision Screw Drives

The H-811 miniature high precision hexapod strikes a perfect balance of size, load and performance. It has many applications in micro-assembly, silicon photonics alignment and also comes in a high-dynamics version for image stabilization. A vacuum-compatible miniature high precision hexapod version to 10-6 hPa is also available. The H-810 is similar, with a smaller base plate diameter.

Special Systems for Photonics Alignment
For fiber alignment and photonics alignment, a special F-712.HU1system based on the H-811 is also available.

H-811.I2 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
  • Range ±17/±16/±6.5mm
  • Rotation range ±10/±10/±21°
  • MiM 0.2/0.2/0.08µm
  • Load capacity 5kg

H-810.I2 6-Axis Miniature Hexapod

High Precision in the Smallest Space
  • Range 20/20/6.5mm
  • Rotation range 10/10/30°
  • MiM 0.5/0.5/0.25µm
  • Load capacity 3kg

H-811.S2 6-Axis Motion Hexapod

Fast and Compact for High Dynamics Applications
  • Range ±17/±16/±6.5mm
  • Rotation range ±10/±10/±21°
  • MiM 1/1/0.5µm
  • Load capacity 2.5kg

H-811.F2 6-Axis Miniature Hexapod

Ideal for Fiber Alignment
  • Brushless DC motor
  • Incremental Rotation encoder
  • Very compact and robust
  • MiM 0.2/0.2/0.08µm

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
  • Vacuum version
  • Range ±17/±16/±6.5mm
  • Rotation range ±10/±10/±21°
  • MiM 0.2/0.2/0.08µm
  • Load capacity 5kg

F-712.HA2 High-Precision Double-Sided Fiber Alignment System

System with 6 Degrees of Freedom for Aligning Fibers and Optical Components
  • Ultra-fast automatic alignment
  • Double sided
  • Hybrid design
  • Integrated scan routines
  • Automatic alignment in &lt
  • 0.5s

Mid Size / Mid Load High Precision Hexapod 6-Axis Stages

Up to 30kg (66lb)

Most of these high performance 6-DOF hexapod stages are available with brushless motors for long life operation. Some provide absolute measuring encoders – no referencing required after power up. The H-824 and H-825 models use a folded drive train for reduced height. The H-206 uses frictionless and backlash-free flexure joints.

H-824 6-Axis Hexapod

Compact and Precise
  • Self-locking version
  • Range ±22.5/±22.5/±12.5mm
  • Rotation range ±7.5/±7.5/±12.5°
  • Load capacity 10kg

H-825 6-Axis Hexapod

Compact Design, for Loads to 30 kg
  • Range ±27.5/±25/±14mm
  • Rotation range ±11.5/±10.5/±19°
  • Load capacity 30kg

H-840 Hexapod 6-Axis Positioning System

Precise, Versatile, Fast, Excellent Value
  • Universally applicable
  • Variant for high dynamics
  • Variant for heavier loads
  • Load capacity up tp 40kg
NEW

H-840.G2IHP 6-Axis Hexapod

Inexpensive and High Precision
  • Brushless BLDC motors
  • Range ±50/±50/±25mm
  • Rotation range ±15/±15/±30°
  • MiM 0.04/0.04/0.02µm
  • Load capacity 40kg

H-820 6-Axis Hexapod

Cost-Effective Hexapod
  • Six degrees of freedom
  • Range ±50/±50/±25mm
  • Rotation range ±15/±15/±30°
  • MiM 5/5/5µm
  • Load capacity 20kg

High Load, High Precision Hexapod 6-Axis Stages

250kg to 500kg (550lb to 1100lb)

These high performance, high load hexapods are designed for standard loads up to 1000kg (higher load custom versions can also be offered). Despite the high load capacity, they deliver sub-micron resolution. PI’s special cardanic joints with Z-offset provide the highest stiffness and best orientation-independent performance and are ideal for industrial automation and production.

H-850 6-Axis Hexapod

For Loads to 250 kg
  • High precision
  • Range ±50/±50/±25mm
  • Rotational range ±15/±15/±30°
  • Load capacity 250kg

High Dynamics Hexapods / Motion Hexapods for 6-Axis Motion Simulation, Image Stabilization

For 6-Axis Motion Simulation, Image Stabilization

Highest Dynamics
The high-speed H-860 6-axis stage is designed for highest acceleration. Its frictionless design is based on closed-loop voice coil drives, flexure guides and carbon fiber struts for minimized mass and inertia – ideal for image stabilization / simulation applications.

Smallest Size
The H-811 is a CIPA certified miniature hexapod with brushless motors and ball screw struts.

Highest Load
The H-900KSCO is designed for high loads in precision industrial automation, machine tools, automotive manufacturing, and simulation of motion on vessels.

H-860 6-Axis Motion Hexapod

Magnetic Direct Drive for High Velocity
  • Precise path tracking
  • Range ±7.5/±7.5/±7.5mm
  • Rotation range ±4/±4/±4°
  • MiM 1/1/1µm
  • Load capacity 1kg

H-811.S2 6-Axis Motion Hexapod

Fast and Compact for High Dynamics Applications
  • Range ±17/±16/±6.5mm
  • Rotation range ±10/±10/±21°
  • MiM 1/1/0.5µm
  • Load capacity 2.5kg

H-900KSCO Fast 6-Axis Hexapod

For Loads to 60 kg
  • Compact and precise
  • Range ±150/±150/±85mm
  • Rotation range ±30/±30/±50°
  • MiM 5/5/3µm
  • Load capacity 60kg

Vacuum Hexapods

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg
  • Vaccum Version
  • Range ±50/±50/±25mm
  • Rotation range ±15/±15/±30°

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
  • Vacuum version
  • Range ±17/±16/±6.5mm
  • Rotation range ±10/±10/±21°
  • MiM 0.2/0.2/0.08µm
  • Load capacity 5kg

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise
  • Vacuum version
  • Range ±22.5/±22.5/±12.5mm
  • Rotation range ±7.5/±7.5/±12.5°
  • Load capacity 5kg

Custom 6-Axis Stage Hexapods

These custom hexapods show the enormous bandwidth of PI‘s design capabilities.


Piezo Flexure Hexapods / 6-Axis Nanopositioning Stages, Short Travel

These piezo-stack driven systems provide faster response than conventional stages, in the low millisecond range, however with positioning ranges limited to <1mm.

P-587 and P-562 are flexure guided, piezo driven stages with capacitive feedback for application, such as ultra-resolution microscopy and optical lithography, etc.

P-562.6CD PIMars 6-Axis Nanopositioning Stage

High-Precision Nanopositioner with 6 Degrees of Freedom

P-915KWEF Piezo Hexapod


Hexapod Controllers / 6 Axis Controllers / Accessories

Manual Control Unit for Hexapods

C-887.MC2 Manual Control Unit for Hexapods

Easy Manual Operation, Position Display
  • 1 knob per Cartesian axis
  • LCD display for all Cartesian axes
  • Programmable step size

C-887.52x Hexapod Motion Controller

Compact benchtop device for controlling 6-axis parallel kinematics
  • High performance with DC motors
  • Remote control & maintenance
  • Easy Integration

C-887.53x Hexapod Motion Controller with EtherCAT®

Control a 6-Axis Positioning System via Fieldbus Interface
  • DC motors
  • Seamless & easy integration
  • Guarantees low reaction times

E-712 Digital Piezo Controller

Modular Controller for up to 6 Axes for Highest Precision
  • Modular controller for up to 6 axes for highest precision, up to 50 kHz servo update rate, extensive software package, flexible interfaces.

Software Tools for Hexapods

Simulation | Collision Avoidance | Emulation


Contact PI UK

For more information about PI’s positioning and motion control solutions using hexapods, contact your local PI applications engineer by filling in the form below.


Technology

Downloads

Catalog

Hexapod Positioning Systems

Parallel Kinematics for Six DoF of Motion, Dedicated Software, Active Alignment Solutions

Version / Date
CAT136 2018-08
pdf - 11 MB
English