A-110.050A1
PIglide LC linear stage, air bearings, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-110 PIglide LC Linear Stage with Air Bearings
Inexpensive High Performance Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 160 mm × 200 mm
- Travel ranges to 400 mm
- Load capacity to 100 N
A-110.050, A-110.100, dimensions in mm
A-100.200, A-100.300, A-100.400, dimensions in mm
A-110 PIglide LC Linear Stage with Air Bearings
Product Description
Specifications
Downloads
Quote / Order
Product overview
PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and friction-free motion for the highest accuracy and reliability
Accessories and options
- Encoder
- PIglide filter and air preparation kits
- Single and multi-axis motion controller
- XY setups and individual configurations
- Base plates made of granite and systems for reducing vibration
Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Select a travel range:
| Motion | A-110.050A1 | A-110.050B1 | A-110.100A1 | A-110.100B1 | A-110.200A1 | A-110.200B1 | A-110.300A1 | A-110.300B1 | A-110.400A1 | A-110.400B1 | Tolerance |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | X | X | X | X | |
| Travel range in X | 50 mm | 50 mm | 100 mm | 100 mm | 200 mm | 200 mm | 300 mm | 300 mm | 400 mm | 400 mm | |
| Acceleration in X, unloaded | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | 20 m/s² | max. |
| Maximum velocity in X, unloaded | 500 mm/s | 500 mm/s | 500 mm/s | 500 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | 1000 mm/s | |
| Straightness (Linear crosstalk in Y with motion in X) | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | max. |
| Flatness (Linear crosstalk in Z with motion in X) | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1 µm | ± 1 µm | ± 1 µm | ± 1 µm | max. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 17.5 µrad | ± 17.5 µrad | ± 20 µrad | ± 20 µrad | max. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 17.5 µrad | ± 17.5 µrad | ± 20 µrad | ± 20 µrad | max. |
| Positioning | A-110.050A1 | A-110.050B1 | A-110.100A1 | A-110.100B1 | A-110.200A1 | A-110.200B1 | A-110.300A1 | A-110.300B1 | A-110.400A1 | A-110.400B1 | Tolerance |
| Bidirectional repeatability in X | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | typ. |
| Positioning accuracy in X, calibrated | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | ± 0.5 µm | typ. |
| Positioning accuracy in X, uncalibrated | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 1.5 µm | ± 2 µm | ± 1.5 µm | ± 3 µm | ± 1.5 µm | ± 4 µm | ± 1.5 µm | typ. |
| Integrated sensor | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | |
| Sensor signal | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | |
| Sensor resolution | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | 4.88 nm | 1 nm | |
| Sensor signal period | 20 µm | 20 µm | 20 µm | 20 µm | 20 µm | ||||||
| Reference switch | Encoder index | Encoder index | Encoder index | Encoder index | Encoder index | ||||||
| Limit switches | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | ||||||
| Drive Properties | A-110.050A1 | A-110.050B1 | A-110.100A1 | A-110.100B1 | A-110.200A1 | A-110.200B1 | A-110.300A1 | A-110.300B1 | A-110.400A1 | A-110.400B1 | Tolerance |
| Drive type | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | |
| Nominal voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | |
| Peak voltage | 60 V | 60 V | 60 V | 60 V | 60 V | 60 V | 60 V | 60 V | 60 V | 60 V | |
| Nominal current, RMS | 1.6 A | 1.6 A | 1.6 A | 1.6 A | 3.2 A | 3.2 A | 3.2 A | 3.2 A | 3.2 A | 3.2 A | typ. |
| Peak current, RMS | 4.2 A | 4.2 A | 4.2 A | 4.2 A | 6.9 A | 6.9 A | 6.9 A | 6.9 A | 6.9 A | 6.9 A | typ. |
| Drive force in negative direction of motion in X | 20 N | 20 N | 20 N | 20 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | typ. |
| Drive force in positive direction of motion in X | 20 N | 20 N | 20 N | 20 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | typ. |
| Peak force in negative direction of motion in X | 60 N | 60 N | 60 N | 60 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | |
| Peak force in positive direction of motion in X | 60 N | 60 N | 60 N | 60 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | |
| Force constant | 4.1 N/A | 4.1 N/A | 4.1 N/A | 4.1 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | |
| Resistance phase-phase | 11 Ω | 11 Ω | 11 Ω | 11 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | typ. |
| Inductance phase-phase | 6 mH | 6 mH | 6 mH | 6 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | |
| Back EMF phase-phase | 10 V·s/m | 10 V·s/m | 10 V·s/m | 10 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | max. |
| Pole pitch N-N | 33.6 mm | 33.6 mm | 33.6 mm | 33.6 mm | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | |
| Mechanical Properties | A-110.050A1 | A-110.050B1 | A-110.100A1 | A-110.100B1 | A-110.200A1 | A-110.200B1 | A-110.300A1 | A-110.300B1 | A-110.400A1 | A-110.400B1 | Tolerance |
| Guide | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | Air bearing guide with preload | |
| Moved mass in X, unloaded | 2500 g | 2500 g | 2500 g | 2500 g | 2600 g | 2600 g | 2600 g | 2600 g | 2600 g | 2600 g | |
| Permissible push force in Z | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | max. |
| Overall mass | 6300 g | 6300 g | 7500 g | 7500 g | 11000 g | 11000 g | 12000 g | 12000 g | 14000 g | 14000 g | |
| Material | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | |
| Miscellaneous | A-110.050A1 | A-110.050B1 | A-110.100A1 | A-110.100B1 | A-110.200A1 | A-110.200B1 | A-110.300A1 | A-110.300B1 | A-110.400A1 | A-110.400B1 | Tolerance |
| Connector | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | |
| Sensor connector | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | |
| Operating pressure | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | 515 to 585 kPa | |
| Air consumption | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | 28 L/min | max. |
| Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
| Recommended controllers / drivers | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | |
| Operating temperature range | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C | 15 to 25 °C |
Downloads
Product Note
Product Note
Product Change Notification A-xxx.*C1
Version / Date
2018-08-02
pdf - 71 KB
English
Datasheet
Documentation
Documentation
User Manual A110D0001
A-110 PIglide LC Linear Air Bearing Stages
Version / Date
2021-05-11
pdf - 1 MB
English
3D Models
3D Models
A-110 3-D model
zip - 9 MB
White Paper
White Paper
Air Bearings: When to Use and When to Avoid in Your Motion Application
All Positioning Stages are not Created Equal. Author: Matt Reck, PI
Version / Date
WP4003 2015-09
pdf - 3 MB
English
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
A-110.050B1
PIglide LC linear stage, air bearings, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-110.100A1
PIglide LC linear stage, air bearings, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-110.100B1
PIglide LC linear stage, air bearings, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-110.200A1
PIglide LC linear stage, air bearings, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-110.200B1
PIglide LC linear stage, air bearings, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-110.300A1
PIglide LC linear stage, air bearings, 300 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-110.300B1
PIglide LC linear stage, air bearings, 300 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-110.400A1
PIglide LC linear stage, air bearings, 400 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-110.400B1
PIglide LC linear stage, air bearings, 400 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
How to Get a Quote
Click on QUOTE / ORDER
Add variant to quote list
Fill out quote form
Send price request to PI
We will contact you shortly
Ask an engineer!
Quickly receive an answer to your question by email or phone from a local PI sales engineer.
Compatible Electronics
Compatible Accessories
Related Products
