Tag: Nanopositioning Stage
PIOne Sensors – High Performance for Nano-Positioning Systems
An In-house Development for Precision over Large Travel Ranges
For conventional nanopositioning with piezo actuators and large travel ranges from 1 mm, incremental position sensors such as PIOne are used instead of capacitive sensors. Dr. Axel Grabowski, Head of Sensor Development at PI and developer of PIOne, explains the advantages of the the incremental position sensor with maximum resolution and moderate energy consumption.
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