Nanopositioning technology describes positioning systems with nanometer accuracy, which means accuracy up to a factor of 1000 more precise than micropositioning technology. From the classical perspective, micro- and nanopositioning technology are technologically different: Micropositioning technology with classical motorization, Nanopositioning technology based on Piezo Actuators. Improved control technologies, Sensor Technology, and guides, e.g., Air Bearing Technology, make it possible for systems with magnetic Direct Drives to push forward into the domain of nanopositioning technology. In this case, unparalleled dynamics are combined with the highest accuracy, and what’s more, a drive that is free of wear and this makes it ideal for applications with high demands on the lifetime.
When taking a look at micropositioning technology from a size point of view, the Q-Motion series is a classical representative: They are based on piezoelectric inertia drives, achieve travel ranges of several 10 millimeters, and a sensor resolution of up to 1 nm. They can also be manufactured with a width of only 20 mm and therefore, as a compact drive solution, now make completely new applications possible.
This shows the Q-Motion series. With piezo inertia drives, linear and rotary Stages are manufactured with a width of 20 mm, travel ranges of several 10 millimeters and a sensor resolution up to 1 nm.