V-731 High-Precision XY Stage

High Travel Accuracy and Stability, Linear Motor

Travel range 205 mm × 205 mm (8")
Unidirectional repeatability to 0.1 µm
Ironless 3-phase linear motor
Velocity to 200 mm/s
Incremental linear encoder with 1 nm resolution
Crossed roller guides

V-731.096111

V-731, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement. Further travel ranges on request.

Medical industry. Laser cutting. Scanning. Biotechnology. Metrology. AOI (Automatic Optical Inspection). Laser marking.

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Datasheet

Version / Date

2020-09-16

pdf - 853 KB

Version / Date

2020-09-16

pdf - 857 KB

Version / Date

2021-01-14

pdf - 498 KB

Download

Motion and positioning	V-731.096111	Unit	Tolerance
Active axes	X, Y
Travel range	205 × 205	mm
Integrated sensor	Incremental linear encoder
Design resolution	0.001	µm
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period
Minimum incremental motion	0.02	µm	Typ.
Unidirectional repeatability	0.1	µm	Typ.
Bidirectional repeatability	±0.25	µm	Typ.
Angular error xry (pitch)	±75	µrad	Typ.
Angular error xrz (yaw)	±30	µrad	Typ.
Angular error yrx (pitch)	±75	µrad	Typ.
Angular error yrz (yaw)	±30	µrad	Typ.
Orthogonality	±96.963	µrad	Typ.
Straightness / flatness	±2	µm	Typ.
Velocity	200	mm/s	Max.
Acceleration in X, without load	5	m/s²	Max.
Acceleration in Y, without load	15	m/s²	Max.
Reference and limit switches	Forked photoelectric sensor, N/C contact, 5V, NPN

Mechanical properties	V-731.096111	Unit	Tolerance
Load capacity	50	N	Max.
Permissible torque in θ_X, θ_Y	125	Nm	Max.
Permissible torque in θ_Z	125	Nm	Max.
Guide	Crossed roller guide with anti-creep system

Drive properties	V-731.096111	Unit	Tolerance
Motor type	Ironless 3-phase linear motor
Operating voltage, nominal	48	V	Nom.
Operating voltage, max.	48	V	Max.
Peak force	80	N	Max.
Nominal force	29	N	Typ.
Peak current, RMS	5	a	Typ.
Nominal current, RMS	1.5	a	Typ.
Force constant, RMS	19.9	N/A	Typ.
Motor constant	4.89	N/√W	Typ.
Electrical time constant	0.4	ms
Resistance phase-phase	11	Ω	Typ.
Inductance phase-phase	3.6	mH	Typ.
Back EMF phase-phase	16	Vs/m	Max.
Pole pitch N-N	30	mm

Miscellaneous	V-731.096111	Unit	Tolerance
Operating temperature range	5 to 40	°C
Material	Aluminum, black anodized
Moved mass in X	15.4	kg	±5 %
Moved mass in Y	5.6	kg	±5 %
Overall mass	19.4	kg	±5 %
MTBF	20000	h
Connector	2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor)
Recommended controller	G-901.R319 SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.

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Product Note

Version / Date

2021-04-19

pdf - 917 KB

English

Download

Datasheet

Version / Date

2020-09-16

pdf - 853 KB

Version / Date

2020-09-16

pdf - 857 KB

Version / Date

2021-01-14

pdf - 498 KB

Download

Documentation

L-731 / V-731 Precision XY Stage

Version / Date

1.1.2 2020-06-30

pdf - 1 MB

Version / Date

1.1.2 2020-06-30

pdf - 1 MB

Documentation

Positioners with Magnetic Linear Motor: V-308 / V-408 / V-508 / V-52x / V-551 / V-610 / V-73x / V-741

Version / Date

4.0.0 12/2020

pdf - 829 KB

Version / Date

4.0.0 12/2020

pdf - 858 KB

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3-D Models

zip - 2 MB

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Separate connection cable required for motor and sensor connection respectively.

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V-731.096111

High-precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, linear motor, linear encoder with sin/cos signal transmission, 20 µm sensor signal period

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