V-731 High-Precision XY Stage
High Travel Accuracy and Stability, Linear Motor
- Travel range 205 mm × 205 mm (8")
- Unidirectional repeatability to 0.1 µm
- Ironless 3-phase linear motor
- Velocity to 200 mm/s
- Incremental linear encoder with 1 nm resolution
- Crossed roller guides
Linear motors
Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement. Further travel ranges on request.
Application fields
Medical industry. Laser cutting. Scanning. Biotechnology. Metrology. AOI (Automatic Optical Inspection). Laser marking.
Specifications
Specifications
Motion and positioning | V-731.096111 | Unit | Tolerance |
---|---|---|---|
Active axes | X, Y | ||
Travel range | 205 × 205 | mm | |
Integrated sensor | Incremental linear encoder | ||
Design resolution | 0.001 | µm | |
Sensor signal | Sin/cos, 1 V peak-peak, 20 µm signal period | ||
Minimum incremental motion | 0.02 | µm | Typ. |
Unidirectional repeatability | 0.1 | µm | Typ. |
Bidirectional repeatability | ±0.25 | µm | Typ. |
Angular error xry (pitch) | ±75 | µrad | Typ. |
Angular error xrz (yaw) | ±30 | µrad | Typ. |
Angular error yrx (pitch) | ±75 | µrad | Typ. |
Angular error yrz (yaw) | ±30 | µrad | Typ. |
Orthogonality | ±96.963 | µrad | Typ. |
Straightness / flatness | ±2 | µm | Typ. |
Velocity | 200 | mm/s | Max. |
Acceleration in X, without load | 5 | m/s² | Max. |
Acceleration in Y, without load | 15 | m/s² | Max. |
Reference and limit switches | Forked photoelectric sensor, N/C contact, 5V, NPN |
Drive properties | V-731.096111 | Unit | Tolerance |
---|---|---|---|
Motor type | Ironless 3-phase linear motor | ||
Operating voltage, nominal | 48 | V | Nom. |
Operating voltage, max. | 48 | V | Max. |
Peak force | 80 | N | Max. |
Nominal force | 29 | N | Typ. |
Peak current, RMS | 5 | a | Typ. |
Nominal current, RMS | 1.5 | a | Typ. |
Force constant, RMS | 19.9 | N/A | Typ. |
Motor constant | 4.89 | N/√W | Typ. |
Electrical time constant | 0.4 | ms | |
Resistance phase-phase | 11 | Ω | Typ. |
Inductance phase-phase | 3.6 | mH | Typ. |
Back EMF phase-phase | 16 | Vs/m | Max. |
Pole pitch N-N | 30 | mm |
Miscellaneous | V-731.096111 | Unit | Tolerance |
---|---|---|---|
Operating temperature range | 5 to 40 | °C | |
Material | Aluminum, black anodized | ||
Moved mass in X | 15.4 | kg | ±5 % |
Moved mass in Y | 5.6 | kg | ±5 % |
Overall mass | 19.4 | kg | ±5 % |
MTBF | 20000 | h | |
Connector | 2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor) | ||
Recommended controller | G-901.R319 SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller |
Downloads
Product Note
Product Change Notification Motor Driven Products
Datasheet
Documentation
User Manual MP158
L-731 / V-731 Precision XY Stage
3-D Models
V-731 3-D model
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