NEW

A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings

High Performance • Cleanroom-Compatible • Low Profile

  • Travel range in Z to ±2.5 mm
  • Rotation range in θX, θY to ±1°
  • Load capacity to 8 kg
  • Platform diameter 250 mm
  • Overall height 60 mm
A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings
Product Description Specifications Downloads Quote / Order

Product overview

A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers top performance, quality, and lifetime.

When the A-523 is ordered together with a controller of the A-81x or A-82x series, PI carries out the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. You receive a complete, ready-to-use positioning system.

Accessories and options

  • Air filter sets
  • Built-in vacuum clamping mechanism

Application fields

The Z tip/tilt stage is ideally suited for high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.

Specifications

Datasheet

Datasheet A-523

Version / Date
2021-05-18
pdf - 1 MB
Version / Date
2021-05-18
pdf - 1 MB

Downloads

Datasheet

Datasheet

Datasheet A-523

Version / Date
2021-05-18
pdf - 1 MB
Version / Date
2021-05-18
pdf - 1 MB

3-D Models

3-D Models

3-D model A-523

Version / Date
2021-03-09
zip - 2 MB

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

A-523.25005B3 NEW!
PIglide high-precision Z tip/tilt stage with air bearings; ironless 3-phase linear motor; 5 mm travel range; 2 ° × 1.6 ° rotational angle (θX × θY); 80 N load capacity; 200 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

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