P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

P-612.Z Piezo Z Stage
Product Description Specifications Downloads Quote / Order
  • Travel range 100 µm
  • Resolution to 0.2 nm
  • Linearity error 0.2 %
  • Compact: Surface 60 mm × 60 mm
  • Particularly inexpensive systems (mechanics and controller)
  • Zero-play, high-precision flexure guide system
  • Outstanding lifetime due to PICMA® piezo actuators

Fields of application

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test procedures and quality assurance
  • Semiconductor technology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Specifications

Datasheet P-612.Z

Version / Date
2018-05-08
Version / Date
2018-05-08
Document language
pdf - 704 KB
pdf - 569 KB

Downloads

Datasheet

Datasheet P-612.Z

Version / Date
2018-05-08
Version / Date
2018-05-08
Document language
pdf - 704 KB
pdf - 569 KB

Documentation

User Manual PZ280

P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages
Version / Date
1.0.0 2017-04-27
Version / Date
1.0.0 2017-04-27
Document language
pdf - 2 MB
pdf - 2 MB

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