P-611.XZ • P-611.2 XZ and XYZ Nanopositioner
Compact Two-Axis Piezo System for Nanopositioning
- Compact: Surface 44 mm × 44 mm
- Travel range to 120 µm × 120 µm
- Resolution to 0.2 nm
- Particularly inexpensive systems (mechanics and controller)
- Zero-play, high-precision flexure guide system
- Outstanding lifetime due to PICMA® piezo actuators
- Also available as linear and Z stage, and as XYZ version
Application fields
- Interferometry
- Microscopy
- Nanopositioning
- Biotechnology
- Test procedures and quality assurance
- Photonics
- Fiber positioning
- Semiconductor technology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Specifications
Specifications
P-611.2S | P-611.20 | P-611.XZS | P-611.XZ0 | Unit | Tolerance | |
---|---|---|---|---|---|---|
Active axes | X, Y | X, Y | X, Z | X, Z | ||
Motion and positioning | ||||||
Integrated sensor | SGS | – | SGS | – | ||
Travel range at -20 to 120 V, open loop | 120 | 120 | 120 | 120 | µm | +20 % / -0 % |
Travel range, closed loop | 100 | – | 100 | – | µm | |
Resolution, open loop | 0.2 | 0.2 | 0.2 | 0.2 | nm | typ. |
Resolution, closed loop | 2 | – | 2 | – | nm | typ. |
Linearity error | 0.1 | – | 0.1 | – | % | typ. |
Repeatability | <10 | – | <10 | – | nm | typ. |
Pitch in X, Y | ±5 | ±5 | ±5 | ±5 | µrad | typ. |
Tilt θX (motion in Z) | – | – | ±10 | ±10 | µrad | typ. |
Yaw in X | ±20 | ±20 | ±20 | ±20 | µrad | typ. |
Yaw in Y | ±10 | ±10 | – | – | µrad | typ. |
Tilt θY (motion in Z) | – | – | ±10 | ±10 | µrad | typ. |
Mechanical properties | ||||||
Stiffness | 0.2 | 0.2 | 0.2 Z: 0.35 | 0.2 Z: 0.35 | N/µm | ±20 % |
Resonant frequency, no load | X: 345; Y: 270 | X: 345; Y: 270 | X: 365; Z: 340 | X: 365; Z: 340 | Hz | ±20 % |
Resonant frequency, under load, 30 g | X: 270; Y: 225 | X: 270; Y: 225 | X: 280; Z: 295 | X: 280; Z: 295 | Hz | ±20 % |
Resonant frequency, under load, 100 g | X: 180; Y: 165 | X: 180; Y: 165 | X: 185; Z: 230 | X: 185; Z: 230 | Hz | ±20 % |
Push/pull force capacity in motion direction | 15 / 10 | 15 / 10 | 15 / 10 | 15 / 10 | N | max. |
Load capacity | 15 | 15 | 15 | 15 | N | max. |
Drive properties | ||||||
Ceramic type | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | ||
Electrical capacitance | 1.5 | 1.5 | 1.5 | 1.5 | µF | ±20 % |
Miscellaneous | ||||||
Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | °C | |
Material | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | ||
Dimensions | 44 mm × 44 mm × 25 mm | 44 mm × 44 mm × 25 mm | 44 mm × 44 mm × 34 mm | 44 mm × 44 mm × 34 mm | ||
Mass | 0.235 | 0.235 | 0.27 | 0.27 | kg | ±5 % |
Cable length | 1.5 | 1.5 | 1.5 | 1.5 | m | ±10 mm |
Sensor connection | LEMO | – | LEMO | – | ||
Voltage connection | LEMO | LEMO | LEMO | LEMO | ||
Recommended electronics | E-503, E-505, E-663, E-664, E-727 | E-503, E-505, E-663, E-664, E-727 | E-503, E-505, E-663, E-664, E-727 | E-503, E-505, E-663, E-664, E-727 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual PZ253
P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor
Unpacking Instructions P611T0006
Unpacking and Handling of P-611 Positioners
3-D Models
P-611.XY • P-611.2 3-D model
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.