P-611.XZ • P-611.2 XZ and XYZ Nanopositioner

Active axes

X, Y

X, Y

X, Z

X, Z

Motion and positioning

Integrated sensor

SGS

–

SGS

–

Travel range at -20 to 120 V, open loop

120

120

120

120

µm

+20 % / -0 %

Travel range, closed loop

100

–

100

–

µm

Resolution, open loop

0.2

0.2

0.2

0.2

nm

typ.

Resolution, closed loop

2

–

2

–

nm

typ.

Linearity error

0.1

–

0.1

–

%

typ.

Repeatability

<10

–

<10

–

nm

typ.

Pitch in X, Y

±5

±5

±5

±5

µrad

typ.

Tilt θ_X (motion in Z)

–

–

±10

±10

µrad

typ.

Yaw in X

±20

±20

±20

±20

µrad

typ.

Yaw in Y

±10

±10

–

–

µrad

typ.

Tilt θ_Y (motion in Z)

–

–

±10

±10

µrad

typ.

Mechanical properties

Stiffness

0.2

0.2

0.2

Z: 0.35

0.2

Z: 0.35

N/µm

±20 %

Resonant frequency, no load

X: 345;

Y: 270

X: 345;

Y: 270

X: 365;

Z: 340

X: 365;

Z: 340

Hz

±20 %

Resonant frequency, under load, 30 g

X: 270;

Y: 225

X: 270;

Y: 225

X: 280;

Z: 295

X: 280;

Z: 295

Hz

±20 %

Resonant frequency, under load, 100 g

X: 180;

Y: 165

X: 180;

Y: 165

X: 185;

Z: 230

X: 185;

Z: 230

Hz

±20 %

Push/pull force capacity in motion direction

15 / 10

15 / 10

15 / 10

15 / 10

N

max.

Load capacity

15

15

15

15

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

1.5

1.5

1.5

µF

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Aluminum, steel

Dimensions

44 mm × 44 mm × 25 mm

44 mm × 44 mm × 25 mm

44 mm × 44 mm × 34 mm

44 mm × 44 mm × 34 mm

Mass

0.235

0.235

0.27

0.27

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

m

±10 mm

Sensor connection

LEMO

–

LEMO

–

Voltage connection

LEMO

LEMO

LEMO

LEMO

Recommended electronics

E-503, E-505, E-663, E-664, E-727

E-503, E-505, E-663, E-664, E-727

E-503, E-505, E-663, E-664, E-727

E-503, E-505, E-663, E-664, E-727