P-733.2 XY Piezo Nanopositioner

High-Precision XY Scanner with Aperture

Travel ranges to 100 µm × 100 µm in X and Y
Resolution to 0.1 nm due to capacitive sensors
High velocity versions with direct drive
Vacuum-compatible and nonmagnetic versions on request
Parallel kinematics for higher accuracy and dynamics
Parallel metrology for active compensation of guiding errors
Zero-play, high-precision flexure guide system
Clear aperture 50 mm × 50 mm for transmitted-light applications

P-733.2CD / .2CL, dimensions in mm

P-733.2DD, dimensions in mm

Scanning microscopy
Confocal microscopy
Mask/wafer positioning
Surface measuring technology
Nanoimprinting
Micromanipulation
Image processing / stabilization
Nanopositioning with high flatness and straightness of motion

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Download datasheet specifications

Datasheet

Version / Date

2020-10-29

pdf - 435 KB

Version / Date

2020-10-29

pdf - 439 KB

Version / Date

2018-06-14

pdf - 728 KB

Version / Date

2018-07-11

pdf - 809 KB

Download

	P-733.2CD P-733.2CL	P-733.2DD	Unit	Tolerance
Active axes	X, Y	X, Y
Motion and positioning
Integrated sensor	Capacitive	Capacitive
Travel range at -20 to 120 V, open loop	115 µm × 115 µm	33 µm × 33 µm		+20 % / -0 %
Travel range, closed loop	100 µm × 100 µm	30 µm × 30 µm
Resolution, open loop	0.2	0.1	nm	typ.
Resolution, closed loop	0.3	0.1	nm	typ.
Linearity error (X, Y)	0.03	0.03*	%	typ.
Repeatability (X, Y)	<2	<2	nm	typ.
Pitch (X,Y)	±3	±5	µrad	typ.
Yaw (X, Y)	±10	±10	µrad	typ.
Mechanical properties
Stiffness	1.5	20	N/µm	±20 %
Resonant frequency, no load	500	2230	Hz	±20 %
Resonant frequency, under load, 120 g	370	–	Hz	±20 %
Resonant frequency, under load, 200 g	340	1550	Hz	±20 %
Push/pull force capacity in motion direction	50 / 20	50 / 20	N	max.
Drive properties
Piezo ceramic	PICMA® P-885	PICMA® P-885
Electrical capacitance	6 (per axis)	6.2 (per axis)	µF	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	°C
Material	Aluminum	Aluminum
Mass	0.58	0.58	kg	±5 %
Cable length	1.5	1.5	m	±10 mm
Sensor/voltage connection	CD version: D-sub 25W3 (m) CL version: LEMO	D-sub 25W3 (m)
Recommended electronics	E-503, E-505, E-610, E-621, E-625, E-712	E-503, E-505, E-610, E-621, E-625, E-712

* With digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

Download datasheet downloads

Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

Download

Datasheet

Version / Date

2020-10-29

pdf - 435 KB

Version / Date

2020-10-29

pdf - 439 KB

Version / Date

2018-06-14

pdf - 728 KB

Version / Date

2018-07-11

pdf - 809 KB

Download

Documentation

P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors

Version / Date

1.1.0 2020-10-26

pdf - 2 MB

Version / Date

1.1.0 2020-10-26

pdf - 2 MB

3-D Models

zip - 2 MB

Brochure

Sample Stages and Holders for Inverted Microscopes

Version / Date

BRO70E R3D

pdf - 4 MB

English

Download

quote / order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

P-733.2DD

High dynamics, high-precision XY nanopositioner, 30 µm × 30 µm, direct drive, capacitive sensors, parallel metrology, D-sub connector

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P-733.2CD

High-precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors, parallel metrology, D-sub connector

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P-733.2CL

High-precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors, parallel metrology, LEMO connectors

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P-733.AP1

Adapter plate for mounting P-733 piezo stages onto M-545 XY stages and U-760 XY stage systems

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