P-313 PicoCube XY(Z) Piezo Scanner
Picometer Precision, High Bandwidth, for Scanning Probe Microscopy
- Highly linear scanner for AFM / SPM
- Up to 20 picometers resolution, hysteresis <1 nm
- Highest bandwidth due to closed-loop drive concept
- Highest-resolution manipulation tool for biotechnology/nanotechnology
- Resonant frequency 4.0 kHz (X, Y), 11 kHz (Z)
- Travel range 1 µm × 1 µm × 0.6 µm
Application fields
- Scanning probe microscopy
- Atomic force microscopy
- Scanning and screening
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
P-313 PicoCube XY(Z) piezo scanner | Unit | |
---|---|---|
Motion and positioning | ||
Active axes | X, Y, Z | |
Travel range X,Y (±250 V) | 1 | µm |
Travel range Z (±250 V) | 0.6 | µm |
Resolution in X, Y | 0.02 | nm |
Resolution in Z | 0.14 | nm |
Mechanical properties | ||
Resonant frequency in X, Y | 4 | kHz |
Resonant frequency in Z | 11 | kHz |
Push/pull force capacity in motion direction | ±10 | N |
Load capacity | ±10 | N |
Miscellaneous | ||
Operating temperature range | 5 to 40 | °C |
Mass | 80 | g |
Cable length | 1.5 | m |
Voltage connection | P-313.30L: LEMO P-313.30D: D-sub 24W7 (m) | |
Recommended electronics | E-536 |
Downloads
Datasheet
Documentation
User Manual P313T0001
P-313 High-Linearity PicoCobe XYZ Positioning and Scanning System
3-D Models
3-D-model P-313.30X
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Technology

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.