P-733.Z High Dynamics Z Nanopositioner / Scanner

Direct Position Measuring and Clear Aperture

P-733.Z High Dynamics Z Nanopositioner / Scanner
Product Description Specifications Downloads Quote / Order
  • Travel range 100 µm
  • Direct metrology with capacitive sensors
  • Resolution to 0.3 nm, closed loop
  • Clear aperture 50 mm × 50 mm
  • Other versions available with additional degrees of freedom
  • XY and XYZ versions available
  • Vacuum-compatible versions available

Fields of application

  • Scanning microscopy
  • Confocal microscopy
  • Mask/wafer positioning
  • Surface measuring technology
  • Nanoimprinting
  • Micromanipulation
  • Image processing / stabilization
  • Nanopositioning with high flatness and straightness of motion

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

Datasheet P-733.Z

Version / Date
2018-04-20
Version / Date
2018-04-20
Version / Date
2018-09-03
Version / Date
2018-09-03
Document language
pdf - 1 MB
pdf - 1 MB
pdf - 831 KB
pdf - 754 KB

Downloads

Datasheet

Datasheet P-733.Z

Version / Date
2018-04-20
Version / Date
2018-04-20
Version / Date
2018-09-03
Version / Date
2018-09-03
Document language
pdf - 1 MB
pdf - 1 MB
pdf - 831 KB
pdf - 754 KB

Documentation

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
4.0.0 2017-02-06
pdf - 635 KB

3-D Models

P-733.Z 3-D model

Quote / Order

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