L-310 V6 Precision Z Stage Suitable for Vacuum

Can be Compactly Combined with Linear and Rotation Stages

Suitable for vacuum up to 10^-6 hPa
Travel range 26 mm (1")
High-resolution encoder
Stepper motor
Zero-play ball screw
Load capacity to 5.5 kg

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L-310.021211V6, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Precision-class Z stage

High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for high stability. 2-phase stepper motor for high torque even at low velocities and high resolution Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range. Integrated linear encoder, installed centrically.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Reduced outgassing especially for use in vacuum environments

Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10^-6 hPa.

Application fields

Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.

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Datasheet

Version / Date

2024-07-15

pdf - 2 MB

Version / Date

2024-07-15

pdf - 2 MB

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Motion	L-310.021211V6	Tolerance
Active axes	Z
Travel range in Z	26 mm
Maximum velocity in Z, unloaded	7.5 mm/s
Straightness error E_XZ	± 3 µm	typ.
Straightness error E_YZ	± 3 µm	typ.
Angular error E_AZ	± 150 µrad	typ.
Angular error E_BZ	± 150 µrad	typ.
Positioning	L-310.021211V6	Tolerance
Minimum incremental motion in Z	0.05 µm	typ.
Unidirectional repeatability in Z	± 0.05 µm	typ.
Bidirectional repeatability in Z	0.4 µm	typ.
Reference switch	Hall effect, N/C contact, 5 V, NPN
Reference switch repeatability	2 µm
Limit switches	Hall effect, N/C contact, 5 V, NPN
Integrated sensor	Incremental linear encoder
Sensor signal	Sin/cos, 1 V peak-peak
Sensor signal period	20 µm
Drive Properties	L-310.021211V6	Tolerance
Drive type	2-phase stepper motor
Nominal voltage	24 V
Peak voltage	48 V
Motor resolution	200 Full steps/rev.
Drive force in positive direction of motion in Z	55 N	typ.
Drive force in negative direction of motion in Z	55 N	typ.
Mechanical Properties	L-310.021211V6	Tolerance
Permissible push force in X	100 N	max.
Permissible push force in Y	50 N	max.
Permissible push force in Z	55 N	max.
Permissible torque in θX	40 N·m	max.
Permissible torque in θY	80 N·m	max.
Permissible torque in θZ	80 N·m	max.
Holding force in Z, passive	50 N
Moved mass in Z, unloaded	900 g
Drive screw type	Ball screw
Drive screw pitch	1 mm
Guide	Crossed roller guide
Overall mass	2600 g
Material	Anodized aluminum
Miscellaneous	L-310.021211V6	Tolerance
Operating temperature range	5 to 40 °C
Vacuum class	10⁻⁶ ǀ hPa
Connector	HD D-sub 26 (m)
Sensor connector	D-sub 9 (m)
Recommended controllers / drivers	C-663.12 C-885 with C-663.12C885 ACS modular controller

At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.

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Datasheet

Version / Date

2024-07-15

pdf - 2 MB

Version / Date

2024-07-15

pdf - 2 MB

Download

Documentation

L-310.021211V6

Version / Date

2022-09-20

pdf - 439 KB

English

Documentation

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

3.0.0 2024-01-15

pdf - 261 KB

Version / Date

3.0.0 2024-01-15

pdf - 295 KB

Download

3D Models

Version / Date

2019-12-06

zip - 3 MB

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L-310.021211V6

Vacuum compatible precision Z stage; 2-phase stepper motor; 26 mm travel range; 55 N load capacity; 7.5 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak; vacuum compatible to 10^-6 hPa

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