This product has been replaced by the following new product: Q-545 Q-Motion® Precision Linear Stage

M-664 Precision Stage with Linear Piezo Drive

Fast, Self-Locking, Low Profile

M-664 Precision Stage with Linear Piezo Drive
Product Description Specifications Downloads Quote / Order
  • Travel range 25 mm
  • Only 15 mm profile height
  • Linear encoder with 100 nm resolution
  • Max. velocity 400 mm/s
  • Self-locking at rest, keine Wärmeentwicklung, no servo jitter

Precision-class micro translation stage

Integrierter Piezokeramischer Direktantrieb. Compact XY combinations available


PILine® piezo ultrasonic drive

Self-locking, with no heat generation at rest. Excellent start / stop dynamics. Crossed roller bearings. Noncontact limit and reference point switches


Direct-metrology linear encoder

High accuracy and repeatability


Fields of application

Industry and research. For Mikromanipulation, Qualitätssicherung, Biotechnologie


Valid patents

US patent no. 6,765,335B2 European patent no. 1267425B1



M-664.AP1 Adapter Plate for XY Mounting of M-664, 4 mm high



This content is only available on tablets or desktop devices.



User Manual MP96

M-664 PILine® Micro Positioning Stage
Version / Date
Version / Date
Document language
pdf - 796 KB
pdf - 1 MB

Short Instructions MP121EK

M-66x, M-68x, U-521, U-62x, U-651 PILine® Stages
Version / Date
4.4.0 2018-06-19
pdf - 709 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.


PILine® Low-Profile Micropositioning Stage with P-664 Piezo Linear Motor, 25 mm, 2.5 N


Adapter Plate for XY Mounting of M-664, 4 mm high

Ask about custom designs!

Contact Us!

Quickly receive an answer to your question by email or phone from a local PI sales engineer.