State Space Control
An alternative control concept is offered for nanopositioning systems: Advanced Piezo Control. This is based on a state space controller which, in turn, is based on a model of the positioning system. Advanced Piezo Control actively dampens the resonance frequency, in contrast to conventional proportional, integral, and differential (PID) controllers with a notch filter, where the mechanical resonance is cut out of the excitation spectrum. The result is faster settling times and a lower sensitivity to external interferences. Phase fidelity is significantly improved compared to damping with one or even two notch filters. This has direct effects on path fidelity and settling behavior.