New Perspectives
Air-bearing solutions and magnetic linear motors currently represent the state of the art in inspection and manufacturing systems in the semiconductor industry. However, with increasing requirements for achieving nanometer precision or for applications in vacuum or nitrogen atmosphere, such systems soon reach their limits.
New perspectives are offered by high-precision magnetic direct drives, as they largely refrain from using mechanical components: Less friction and backlash, more precision!
Characteristics of Magnetic Levitation
Magnetic levitation ensures excellent guiding accuracy in a plane, both linear and rotational: The passive rod levitates on a magnetic field and is actively guided by the field. Sequence errors are measured and compensated by very accurate contact-free sensors. Contrary to air bearings, which are also very accurate, magnetic bearings can also be used in a vacuum. New perspectives for high-precision positioning systems: The PIMag® 6-D is a study for a planar positioning system with magnetic drive and 6-D sensor. The system can detect and compensate deviations from the ideal path in all six motion axes.
New perspectives for high-precision positioning systems: The PIMag® 6-D is a study for a planar positioning system with magnetic drive and 6-D sensor. The system can detect and compensate deviations from the ideal path in all six motion axes.
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