Physik Instrumente UK

Capacitive Metrology Sensors Introduction
PI capacitive (capacitance) sensors are the metrology system of choice for the most demanding nanopositioning applications. They are absolute-measuring, high-dynamics devices. PI capacitive sensors / control electronics use a high-frequency AC excitation signal for enhanced bandwidth and drift-free measurement stability (subnanometer stability over several hours, see Fig. 6, on Link).

M-686 open-frame piezomotor stages are mainly designed for automated positioning applications in microscopy. The form factor of the M-686 is optimized for a low profile height of 27 mm, footprint and mounting pattern fit directly together with many PI standard nanopositioning systems.

P-876 DuraAct™ patch transducers offer the functionality of piezoceramic materials as sensors and actuators as well as for electrical charge generation and storage. Used as bender actuators, they allow high deflections of up to 0.8 mm with high force and high precision.

Piezo motors and linear actuators offer unique properties over conventional drives such as DC or Stepper.  With the active element manufactured from ceramic, applications in vacuum and non magnetic environments are feasible. PI has many different technologies, including single element and stacked actuators, PILine® which is a motor based  on an ultrasonic drive principle and NEXACT® and NEXLINE® which use a stepping (walking) principle.