Precision linear stage; ironless 3-phase linear motor; 305 mm travel range; 250 N load capacity; 500 mm/s maximum velocity; incremental linear encoder, 15 nm sensor resolution, sin/cos, 1 V peak-peak
LMS-180 Precision Linear Stage
High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy
- Travel ranges to 508 mm (20")
- Velocity to 500 mm/s
- Incremental encoder with 15 nm resolution
Please note that at the moment only a limited selelction of variants of this product family is available. This selection can be found here on the web page. The complete list of products can be found in the PDF datasheet that is available for download.
If you require further information contact us via info@pi.ws.
Reference-class linear stage
High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp). Multi-axis combinations with the directly driven rotation stages of the UPR series. Models with DC servo or stepper motors are available with the same footprint.
Magnetic direct drive
Ironless magnetic direct drive for high velocity and acceleration. High position resolution.
Application fields
Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.
Specifications
Specifications
Motion | 68509131 | Tolerance |
---|---|---|
Active axes | X | |
Travel range in X | 305 mm | |
Maximum velocity in X, unloaded | 500 mm/s | |
Straightness (Linear crosstalk in Y with motion in X) | ± 4 µm | typ. |
Flatness (Linear crosstalk in Z with motion in X) | ± 4 µm | typ. |
Pitch (Rotational crosstalk in θY with motion in X) | ± 60 µrad | typ. |
Yaw (Rotational crosstalk in θZ with motion in X) | ± 50 µrad | typ. |
Positioning | 68509131 | Tolerance |
Minimum incremental motion in X | 0.04 µm | typ. |
Unidirectional repeatability in X | ± 0.05 µm | typ. |
Bidirectional repeatability in X | 0.2 µm | typ. |
Reference switch | Encoder index | |
Limit switches | Inductive | |
Integrated sensor | Incremental linear encoder | |
Sensor signal | Sin/cos, 1 V peak-peak | |
Sensor resolution | 15 nm | |
Drive Properties | 68509131 | Tolerance |
Drive type | Ironless 3-phase linear motor | |
Nominal voltage | 48 V | |
Nominal current, RMS | 3.2 A | typ. |
Peak current, RMS | 7.5 A | typ. |
Drive force in positive direction of motion in X | 50 N | typ. |
Drive force in negative direction of motion in X | 50 N | typ. |
Peak force in positive direction of motion in X | 150 N | |
Peak force in negative direction of motion in X | 150 N | |
Force constant | 19.9 N/A | |
Resistance phase-phase | 1.8 Ω | typ. |
Inductance phase-phase | 0.6 mH | |
Back EMF phase-phase | 16 V·s/m | max. |
Pole pitch N-N | 30 mm | |
Mechanical Properties | 68509131 | Tolerance |
Permissible push force in Y | 500 N | max. |
Permissible push force in Z | 250 N | max. |
Moved mass in X, unloaded | 900 g | |
Guide | Recirculating ball bearing guide | |
Overall mass | 11500 g | |
Material | Black anodized aluminum | |
Miscellaneous | 68509131 | Tolerance |
Operating temperature range | 10 to 50 °C | |
Connector | D-sub 9W4 (m) | |
Sensor connector | D-sub 9 (m) | |
Recommended controllers / drivers | ACS SPii+EC and other industrial solutions |
Downloads
Product Note
Product Change Notification Motor Driven Products
Datasheet
Documentation
User Manual LMS-180
Precision Linear Stage
3-D Models
LMS-180 3-D model
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