D-015 • D-050 • D-100 Capacitive Sensors
Subnanometer-Resolution Position Sensors
- For applications with the highest precision requirements
- Measuring range to 1000 µm
- Resolution to 0.01 nm
- Linearity error to 0.01 % with digital controller
- E-509.CxA control electronics, compatible with E-500 piezo controller system
Resolution
Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/ÖHz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.
In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.
Fields of application
High-precision positioning.
Specifications
Specifications
Sensor | D-015.00 | D-050.00 | D-100.00 |
---|---|---|---|
Sensor type | Capacitive | Capacitive | Capacitive |
Nominal measuring range | 15 µm | 50 µm | 100 µm |
Extended measuring range | 45 µm | 150 µm | 300 µm |
Resolution* | 0.001 % of the measuring range | 0.001 % of the measuring range | 0.001 % of the measuring range |
Linearity error** | 0.01 % | 0.01 % | 0.01 % |
Sensor active area | 16.60 mm² | 56.5 mm² | 113.10 mm² |
Thermal drift*** | 50 ppm/K | 50 ppm/K | 50 ppm/K |
Downloads
Product Note
Product Change Notification D-015
Datasheet
Documentation
User Manual PZ106
D-015, D-050, D-100 Capacitive Sensors
Quote / Order
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