D-015 • D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

For applications with the highest precision requirements
Measuring range to 1000 µm
Resolution to 0.01 nm
Linearity error to 0.01 % with digital controller
E-509.CxA control electronics, compatible with E-500 piezo controller system

D-015.00, dimensions in mm

D-050.00, dimensions in mm

D-100.00, dimensions in mm

Motion of a piezo nanopositioning system with 0.3 nm steps, measured with a capacitive sensor from PI (lower curve) and with a highly accurate laser interferometer (model Zygo ZMI 2000, upper curve). The capacitive sensor shows a significantly higher resolution than the interferometer.

Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/ÖHz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.

In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.

High-precision positioning.

Download datasheet specifications

Datasheet

Version / Date

2018-04-06

pdf - 563 KB

Version / Date

2018-04-06

pdf - 565 KB

Version / Date

2018-06-18

pdf - 860 KB

Download

Sensor	D-015.00	D-050.00	D-100.00
Sensor type	Capacitive	Capacitive	Capacitive
Nominal measuring range	15 µm	50 µm	100 µm
Extended measuring range	45 µm	150 µm	300 µm
Resolution*	0.001 % of the measuring range	0.001 % of the measuring range	0.001 % of the measuring range
Linearity error**	0.01 %	0.01 %	0.01 %
Sensor active area	16.60 mm²	56.5 mm²	113.10 mm²
Thermal drift***	50 ppm/K	50 ppm/K	50 ppm/K

Miscellaneous	D-015.00	D-050.00	D-100.00
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Material	Aluminum	Aluminum	Aluminum
Recommended evaluation electronics	E-509.CxA	E-509.CxA	E-509.CxA

* At 3 kHz, with E-509.C3A

** With digital controller; to 0.05 % with E-509 analog controller

*** Change of active surface size in ppm (parts per million), refers to measuring range

Ask for custom materials.

Download datasheet downloads

Product Note

Version / Date

2021-12-20

pdf - 111 KB

English

Download

Datasheet

Version / Date

2018-04-06

pdf - 563 KB

Version / Date

2018-04-06

pdf - 565 KB

Version / Date

2018-06-18

pdf - 860 KB

Download

Documentation

D-015, D-050, D-100 Capacitive Sensors

Version / Date

2003-11-05

pdf - 228 KB

English

quote / order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

D-015.00

Capacitive two-plate position sensor, 15 µm nominal measuring range, aluminum

Add to quote list Remove from quote list

D-050.00

Capacitive two-plate position sensor, 50 µm nominal measuring range, aluminum

Add to quote list Remove from quote list

D-100.00

Capacitive two-plate position sensor, 100 µm nominal measuring range, aluminum

Add to quote list Remove from quote list

Ask for custom design quote list

Quickly receive an answer to your question by email or phone from a local PI sales engineer.

0123 475 6360 uk@pi.ws