This product has been replaced by the following new product: Q-632 Q‑Motion® Rotation Stage

Q-622 Q-Motion® Miniature Rotation Stage

Minimum Dimensions: 22 mm Turntable Diameter

  • Only 22 mm in width and 10 mm in height
  • Direct position measurement with incremental encoder with 0.55 µrad resolution
  • Up to 2.2 µrad minimum incremental motion
  • Velocity 70 °/s
  • Mountable on the Q-522 linear stage without adapter
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available
Q-622 Q-Motion® Miniature Rotation Stage
Product Description Specifications Downloads Quote / Order

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 70 °/s

Application fields

Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing

Specifications

Datasheet

Datasheet Q-622

Version / Date
2019-01-22
pdf - 624 KB
Version / Date
2019-01-22
pdf - 631 KB
Version / Date
2019-01-22
pdf - 705 KB

Downloads

Product Note

Product Note

Product Change Notification Q-xxx; N-765

Version / Date
2019-03-26
pdf - 435 KB
English

Datasheet

Datasheet

Datasheet Q-622

Version / Date
2019-01-22
pdf - 624 KB
Version / Date
2019-01-22
pdf - 631 KB
Version / Date
2019-01-22
pdf - 705 KB

Documentation

Documentation

User Manual MP128

Q-622 Q-Motion Miniature Rotation Stage with 22 mm Turntable Diameter, Piezoelectric Inertia Drive

Version / Date
1.1.0 2017-11-28
pdf - 2 MB
Version / Date
1.1.0 2017-11-28
pdf - 2 MB
Documentation

Short Instructions MP139EK

Q-Motion® Positioners: Q-5xx, Q-6xx

Version / Date
4.2.0 12/2019
pdf - 1 MB
Version / Date
4.2.0 12/2019
pdf - 1 MB

3-D Models

3-D Models

Q-622 3-D model

zip - 675 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Q-622.930

Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, incremental encoder, 0.55 µrad resolution, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-6 hPa

Q-622.900

Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-6 hPa

Q-622.90U

Q-Motion® rotation stage, piezoelectric inertia drive, >360° rotation range, without position sensor for open-loop operation, 5 mNm torque, 22 mm diameter, vacuum compatible to 10-9 hPa

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