VT-80 V6 Linear Stage Suitable for Vacuum

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Motion	6230V61000	6230V62000	6230V64000	6230V65000	6230V66000	Tolerance
Active axes	X	X	X	X	X
Travel range in X	25 mm	50 mm	100 mm	150 mm	200 mm
Maximum velocity in X, unloaded	10 mm/s	10 mm/s	10 mm/s	10 mm/s	10 mm/s
Straightness (Linear crosstalk in Y with motion in X)	± 8 µm	± 10 µm	± 12 µm	± 14 µm	± 20 µm	typ.
Flatness (Linear crosstalk in Z with motion in X)	± 8 µm	± 10 µm	± 12 µm	± 14 µm	± 20 µm	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 100 µrad	± 110 µrad	± 130 µrad	± 150 µrad	± 170 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	typ.
Positioning	6230V61000	6230V62000	6230V64000	6230V65000	6230V66000	Tolerance
System resolution in X	5000 nm	5000 nm	5000 nm	5000 nm	5000 nm
Unidirectional repeatability in X	0.4 µm	0.4 µm	0.4 µm	0.4 µm	0.4 µm	typ.
Bidirectional repeatability in X	± 10 µm	± 10 µm	± 10 µm	± 10 µm	± 10 µm	typ.
Minimum incremental motion in X	0.2 µm	0.2 µm	0.2 µm	0.2 µm	0.2 µm	typ.
Limit switch	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN
Drive Properties	6230V61000	6230V62000	6230V64000	6230V65000	6230V66000	Tolerance
Drive type	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor
Motor resolution	200 Full steps/rev.	200 Full steps/rev.	200 Full steps/rev.	200 Full steps/rev.	200 Full steps/rev.
Nominal voltage	24 V	24 V	24 V	24 V	24 V
Peak voltage	48 V	48 V	48 V	48 V	48 V
Drive force in negative direction of motion in X	40 N	40 N	40 N	40 N	40 N	typ.
Drive force in positive direction of motion in X	40 N	40 N	40 N	40 N	40 N	typ.
Mechanical Properties	6230V61000	6230V62000	6230V64000	6230V65000	6230V66000	Tolerance
Guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide
Drive screw type	Trapezoidal drive screw	Trapezoidal drive screw	Trapezoidal drive screw	Trapezoidal drive screw	Trapezoidal drive screw
Drive screw pitch	1 mm	1 mm	1 mm	1 mm	1 mm
Holding force in X, passive	40 N	40 N	40 N	40 N	40 N
Moved mass in X, unloaded	160 g	160 g	170 g	170 g	180 g
Permissible push force in Y	30 N	30 N	30 N	30 N	30 N	max.
Permissible push force in Z	50 N	50 N	50 N	50 N	50 N	max.
Permissible torque in θx	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	max.
Permissible torque in θY	5 N·m	5 N·m	5 N·m	5 N·m	5 N·m	max.
Permissible torque in θZ	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	max.
Overall mass	550 g	650 g	750 g	850 g	950 g
Material	Aluminum, anodized	Aluminum, anodized	Aluminum, anodized	Aluminum, anodized	Aluminum, anodized
Miscellaneous	6230V61000	6230V62000	6230V64000	6230V65000	6230V66000	Tolerance
Connector	HD D-sub 15 (m)	HD D-sub 15 (m)	HD D-sub 15 (m)	HD D-sub 15 (m)	HD D-sub 15 (m)
Vacuum class	10E-6 hPa hPa	10E-6 hPa hPa	10E-6 hPa hPa	10E-6 hPa hPa	10E-6 hPa hPa
Recommended controllers / drivers	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller
Operating temperature range	0 to 80 °C	0 to 80 °C	0 to 80 °C	0 to 80 °C	0 to 80 °C
Maximum bake out temperature	80 °C	80 °C	80 °C	80 °C	80 °C

Datasheet

Datasheet VT-80 V

Version / Date

2021-04-08

Version / Date

2021-04-08

Version / Date

2021-01-14

Document language

pdf - 4 MB

pdf - 4 MB

pdf - 677 KB

Documentation

User Manual 6230T0003

6230V63000 Precision linear stage with stepper drive for vacuum applications (1 E-6 hPa)

Version / Date

2020-05-08

Document language English

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Documentation

User Manual 6230T0001

6230V61000 Precision linear stage with stepper drive for vacuum applications (1 E-6 hPa)

Version / Date

2020-06-29

Document language English

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Documentation

User Manual VT-80

Linear Stage

Version / Date

2019-12-04

Version / Date

2019-12-05

Document language

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Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020

Version / Date

2.0.0 01/2020

Document language

pdf - 736 KB

pdf - 749 KB

3-D Models

3-D model VT-80 V6

Version / Date

2021-03-26

Document language English

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6230V61000 NEW!

Vacuum compatible linear stage; 2-phase stepper motor; 25 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; trapezoidal drive screw; vacuum compatible to 10 hPa

6230V62000 NEW!

Vacuum compatible linear stage; 2-phase stepper motor; 50 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; trapezoidal drive screw; vacuum compatible to 10 hPa

6230V64000 NEW!

Vacuum compatible linear stage; 2-phase stepper motor; 100 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; trapezoidal drive screw; vacuum compatible to 10 hPa

6230V65000 NEW!

Vacuum compatible linear stage; 2-phase stepper motor; 150 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; trapezoidal drive screw; vacuum compatible to 10 hPa

6230V66000 NEW!

Vacuum compatible linear stage; 2-phase stepper motor; 200 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; trapezoidal drive screw; vacuum compatible to 10 hPa