6230V61000 NEW!
Vacuum-compatible linear stage; 2-phase stepper motor; 25 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; metric leadscrew; vacuum compatible to 10-6 hPa
VT-80 V6 Linear Stage Suitable for Vacuum
Basic Version for Universal Fields of Use
- Suitable for vacuum up to 10-6 hPa
- Travel ranges between 25 and 300 mm
- Low profile
- Max. Velocity to 10 mm/s
- Load capacity to 5 kg
6230V66000
6230V61000, dimensions in mm
6230V62000, dimensions in mm
6230V64000, dimensions in mm
6230V65000, dimensions in mm
6230V66000, dimensions in mm
VT-80 V6 Linear Stage Suitable for Vacuum
Product Description
Specifications
Downloads
Quote / Order
Standard-class linear stage
Recirculating ball bearing guides and precision leadscrew for smooth and even feed. Stress-relieved aluminum base for high stability. Compact XY combinations. Two mechanical limit switches.
Recirculating ball bearing guides
When carefully assembled, recirculating ball bearing guides are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded recirculating ball bearing units, which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6hPa.
Drive
2-phase stepper motor for high torque even at low velocities and high resolution
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Specifications
Specifications
Select a travel range:
Click inside the table and use your arrow keys to scroll left or right.
| Motion | 6230V61000 | 6230V62000 | 6230V64000 | 6230V65000 | 6230V66000 | 6230V68000 | Tolerance |
|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | |
| Travel range in X | 25 mm | 50 mm | 100 mm | 150 mm | 200 mm | 300 mm | |
| Maximum velocity in X, unloaded | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | |
| Straightness (Linear crosstalk in Y with motion in X) | ± 8 µm | ± 10 µm | ± 12 µm | ± 14 µm | ± 20 µm | ± 35 µm | typ. |
| Flatness (Linear crosstalk in Z with motion in X) | ± 8 µm | ± 10 µm | ± 12 µm | ± 14 µm | ± 20 µm | ± 35 µm | typ. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 100 µrad | ± 110 µrad | ± 130 µrad | ± 150 µrad | ± 170 µrad | ± 210 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 150 µrad | ± 150 µrad | ± 150 µrad | ± 150 µrad | ± 150 µrad | ± 150 µrad | typ. |
| Positioning | 6230V61000 | 6230V62000 | 6230V64000 | 6230V65000 | 6230V66000 | 6230V68000 | Tolerance |
| System resolution in X | 5000 nm | 5000 nm | 5000 nm | 5000 nm | 5000 nm | 5000 nm | |
| Unidirectional repeatability in X | 0.4 µm | 0.4 µm | 0.4 µm | 0.4 µm | 0.4 µm | 0.4 µm | typ. |
| Bidirectional repeatability in X | ± 10 µm | ± 10 µm | ± 10 µm | ± 10 µm | ± 10 µm | ± 10 µm | typ. |
| Minimum incremental motion in X | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | typ. |
| Limit switches | Mechanical, N/C contact, to 30 V, NPN | Mechanical, N/C contact, to 30 V, NPN | Mechanical, N/C contact, to 30 V, NPN | Mechanical, N/C contact, to 30 V, NPN | Mechanical, N/C contact, to 30 V, NPN | Mechanical, N/C contact, to 30 V, NPN | |
| Drive Properties | 6230V61000 | 6230V62000 | 6230V64000 | 6230V65000 | 6230V66000 | 6230V68000 | Tolerance |
| Drive type | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | |
| Motor resolution | 200 Full steps/rev. | 200 Full steps/rev. | 200 Full steps/rev. | 200 Full steps/rev. | 200 Full steps/rev. | 200 Full steps/rev. | |
| Nominal voltage | 24 V | 24 V | 24 V | 24 V | 24 V | 24 V | |
| Peak voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | |
| Drive force in negative direction of motion in X | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | typ. |
| Drive force in positive direction of motion in X | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | typ. |
| Mechanical Properties | 6230V61000 | 6230V62000 | 6230V64000 | 6230V65000 | 6230V66000 | 6230V68000 | Tolerance |
| Guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | Recirculating ball bearing guide | |
| Drive screw type | Metric leadscrew | Metric leadscrew | Metric leadscrew | Metric leadscrew | Metric leadscrew | Metric leadscrew | |
| Drive screw pitch | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | |
| Holding force in X, passive | 40 N | 40 N | 40 N | 40 N | 40 N | 40 N | |
| Moved mass in X, unloaded | 160 g | 160 g | 170 g | 170 g | 180 g | 180 g | |
| Permissible push force in Y | 30 N | 30 N | 30 N | 30 N | 30 N | 30 N | max. |
| Permissible push force in Z | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | max. |
| Permissible torque in θx | 2.5 N·m | 2.5 N·m | 2.5 N·m | 2.5 N·m | 2.5 N·m | 2.5 N·m | max. |
| Permissible torque in θY | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | 5 N·m | max. |
| Permissible torque in θZ | 2.5 N·m | 2.5 N·m | 2.5 N·m | 2.5 N·m | 2.5 N·m | 2.5 N·m | max. |
| Overall mass | 550 g | 650 g | 750 g | 850 g | 950 g | 1250 g | |
| Material | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | |
| Miscellaneous | 6230V61000 | 6230V62000 | 6230V64000 | 6230V65000 | 6230V66000 | 6230V68000 | Tolerance |
| Connector | HD D-sub 15 (m) | HD D-sub 15 (m) | HD D-sub 15 (m) | HD D-sub 15 (m) | HD D-sub 15 (m) | HD D-sub 15 (m) | |
| Vacuum class | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | 10E-6 hPa | |
| Recommended controllers / drivers | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | |
| Operating temperature range | 0 to 80 °C | 0 to 80 °C | 0 to 80 °C | 0 to 80 °C | 0 to 80 °C | 0 to 80 °C | |
| Maximum bake out temperature | 80 °C | 80 °C | 80 °C | 80 °C | 80 °C | 80 °C |
Downloads
Datasheet
Documentation
Documentation
User Manual 6230T0003
6230V63000 Precision linear stage with stepper drive for vacuum applications (1 E-6 hPa)
Version / Date
2020-05-08
pdf - 294 KB
English
Documentation
User Manual 6230T0001
6230V61000 Precision linear stage with stepper drive for vacuum applications (1 E-6 hPa)
Version / Date
2021-10-08
pdf - 506 KB
English
Documentation
User Manual VT-80
Linear Stage
Version / Date
2019-12-04
pdf - 1 MB
Version / Date
2019-12-05
pdf - 1 MB
3-D Models
3-D Models
3-D model VT-80 V6
Version / Date
2021-03-26
zip - 4 MB
English
Separate connection cable required for motor and sensor connection respectively.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
6230V62000 NEW!
Vacuum-compatible linear stage; 2-phase stepper motor; 50 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; metric leadscrew; vacuum compatible to 10-6 hPa
6230V64000 NEW!
Vacuum-compatible linear stage; 2-phase stepper motor; 100 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; metric leadscrew; vacuum compatible to 10-6 hPa
6230V65000 NEW!
Vacuum-compatible linear stage; 2-phase stepper motor; 150 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; metric leadscrew; vacuum compatible to 10-6 hPa
6230V66000 NEW!
Vacuum-compatible linear stage; 2-phase stepper motor; 200 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; metric leadscrew; vacuum compatible to 10-6 hPa
6230V68000
Vacuum-compatible linear stage; 2-phase stepper motor; 300 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; metric leadscrew; vacuum compatible to 10-6 hPa
