A-121.050A1
PIglide AT1 Linear stage, air bearing, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121 PIglide AT1 Linear Stage with Air Bearings
High Performance Small Footprint Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 115 mm × 115 mm
- Travel ranges to 350 mm
- Low profile from 60 mm
- Resolution to 1 nm
A-121, dimensions in mm
A-121 PIglide AT1 Linear Stage with Air Bearings
Product Description
Specifications
Downloads
Quote / Order
Product overview
The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation.
Accessories and options
- Encoder
- PIglide filter and air preparation kits
- Multi-axis motion controller and direct drives
- XY setups and individual configurations
- Cable track variations
- Counterbalance options for vertical assembly
- Base plates made of granite and systems for reducing vibration
Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Motion | A-121.050 | A-121.100 | A-121.150 | A-121.200 | A-121.250 | A-121.350 | Unit | Tolerance |
|---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | ||
Travel range | 50 | 100 | 150 | 200 | 250 | 350 | mm | |
Pitch / yaw (1) | 20 | 20 | 20 | 20 | 25 | 35 | µrad | Max. |
Straightness / flatness (1) | 0.5 | 0.5 | 1 | 1.5 | 2 | 2.5 | µm | Max. |
Straightness / flatness per 25 mm travel range (1) | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | µm | Max. |
Velocity, unloaded (2) | 0.5 | 1 | 1 | 1 | 1 | 1 | m/s | Max. |
Acceleration, unloaded (2) | 20 | 20 | 20 | 20 | 20 | 20 | m/s² | Max. |
Mechanical properties | A-121.050 | A-121.100 | A-121.150 | A-121.200 | A-121.250 | A-121.350 | Unit | Tolerance |
|---|---|---|---|---|---|---|---|---|
Load capacity in z (6) | 100 | 100 | 100 | 100 | 100 | 100 | N | Max. |
Load capacity in y (6) | 40 | 40 | 40 | 40 | 40 | 40 | N | Max. |
Permissible torque in θx (6) | 5 | 5 | 5 | 5 | 5 | 5 | Nm | Max. |
Permissible torque in θy (6) | 8.3 | 8.3 | 8.3 | 8.3 | 8.3 | 8.3 | Nm | Max. |
Moved mass | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | kg | Typ. |
Overall mass | 3.5 | 4.2 | 4.5 | 5.2 | 5.7 | 6.8 | kg | Typ. |
Guide type | Air bearing | Air bearing | Air bearing | Air bearing | Air bearing | Air bearing |
Drive properties | A-121 | Unit | Tolerance |
|---|---|---|---|
Drive type | Ironless 3-phase linear motor | ||
Intermediate circuit voltage, RMS | 48, nominal 80, max. | V DC | |
Peak current, RMS | 3.5 | A | Max. |
Nominal current, RMS | 1.2 | A | Max. |
Peak force | 33.2 | N | Max. |
Nominal force | 11.1 | N | Max. |
Force constant, RMS | 9.4 | N/A | Typ. |
Resistance phase-phase | 6.3 | Ω | Typ. |
Inductance phase-phase | 1.0 | mH | Typ. |
Back EMF phase-phase | 7.7 | V·s/m | Typ. |
Cabling | External, moving cable |
Positioning | A-121.xxxA | A-121.xxxB |
|---|---|---|
Integrated sensor | Incremental linear encoder | Absolute linear encoder |
Sensor signal | Sin/cos, 1 V peak-peak, 20 µm signal period | BiSS-C |
Sensor resolution | 4.88 nm (3) | 1 nm |
Bidirectional repeatability | ±0.25 µm | ±0.25 µm |
Positioning accuracy, uncalibrated (4) | A-121.050: ± 1.5 µm A-121.100: ± 1.5 µm A-121.150: ± 1.5 µm A-121.200: ± 2.0 µm A-121.250: ± 2.0 µm A-121.350: ± 3.0 µm | A-121.050: ± 1.5 µm A-121.100: ± 1.5 µm A-121.150: ± 1.5 µm A-121.200: ± 1.5 µm A-121.250: ± 1.5 µm A-121.350: ± 1.5 µm |
Positioning accuracy, calibrated (4) | A-121.050: ± 0.5 µm A-121.100: ± 0.5 µm A-121.150: ± 0.5 µm A-121.200: ± 0.5 µm A-121.250: ± 0.5 µm A-121.350: ± 0.5 µm | A-121.050: ± 0.5 µm A-121.100: ± 0.5 µm A-121.150: ± 0.5 µm A-121.200: ± 0.5 µm A-121.250: ± 0.5 µm A-121.350: ± 0.5 µm |
Miscellaneous | A-121 |
|---|---|
Operating pressure (5) | 65 to 75 psi (450 to 520 kPa) |
Air consumption | < 1.0 SCFM (28 SLPM) |
Air quality | Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3 |
Materials | Hardcoat aluminum, stainless steel mounting hardware |
(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes 4096x interpolation. Contact PI for the use of other factors.
(4) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.
(5) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
(6) Assumes an air bearing operating pressure of 70 psi (480 kPa).
Downloads
Product Note
Product Note
Product Change Notification A-xxx.*C1
Version / Date
2018-08-02
pdf - 71 KB
English
Datasheet
Documentation
Documentation
User Manual A121D0001
A-121 PIglide AT1 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
Version / Date
2021-05-17
pdf - 1,020 KB
English
3-D Models
3-D Models
A-121 3-D model
Version / Date
2018-03-15
zip - 12 MB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
A-121.050B1
PIglide AT1 Linear stage, air bearing, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.100A1
PIglide AT1 Linear stage, air bearing, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.100B1
PIglide AT1 Linear stage, air bearing, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.150A1
PIglide AT1 Linear stage, air bearing, 150 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.150B1
PIglide AT1 Linear stage, air bearing, 150 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.200A1
PIglide AT1 Linear stage, air bearing, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.200B1
PIglide AT1 Linear stage, air bearing, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.250A1
PIglide AT1 Linear stage, air bearing, 250 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.250B1
PIglide AT1 Linear stage, air bearing, 250 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.350A1
PIglide AT1 Linear stage, air bearing, 350 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.350B1
PIglide AT1 Linear stage, air bearing, 350 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
