A-121 PIglide AT1 Linear Stage with Air Bearings

High Performance Small Footprint Nanopositioning Stage

A-121 PIglide AT1 Linear Stage with Air Bearings

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The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation.

Encoder
PIglide filter and air preparation kits
Multi-axis motion controller and direct drives
XY setups and individual configurations
Cable track variations
Counterbalance options for vertical assembly
Base plates made of granite and systems for reducing vibration

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

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Datasheet

Datasheet A-121

Version / Date

2021-04-27

Version / Date

2021-04-27

Version / Date

2021-04-27

Document language

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pdf - 1 MB

Download

pdf - 1 MB

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pdf - 714 KB

Motion	A-121.050	A-121.100	A-121.150	A-121.200	A-121.250	A-121.350	Unit	Tolerance
Active axes	X	X	X	X	X	X
Travel range	50	100	150	200	250	350	mm
Pitch / yaw ⁽¹⁾	20	20	20	20	25	35	µrad	Max.
Straightness / flatness ⁽¹⁾	0.5	0.5	1	1.5	2	2.5	µm	Max.
Straightness / flatness per 25 mm travel range ⁽¹⁾	0.1	0.1	0.1	0.1	0.1	0.1	µm	Max.
Velocity, unloaded ⁽²⁾	0.5	1	1	1	1	1	m/s	Max.
Acceleration, unloaded ⁽²⁾	20	20	20	20	20	20	m/s²	Max.

Mechanical properties	A-121.050	A-121.100	A-121.150	A-121.200	A-121.250	A-121.350	Unit	Tolerance
Load capacity in z ⁽⁶⁾	100	100	100	100	100	100	N	Max.
Load capacity in y ⁽⁶⁾	40	40	40	40	40	40	N	Max.
Permissible torque in θx ⁽⁶⁾	5	5	5	5	5	5	Nm	Max.
Permissible torque in θy ⁽⁶⁾	8.3	8.3	8.3	8.3	8.3	8.3	Nm	Max.
Moved mass	1.2	1.2	1.2	1.2	1.2	1.2	kg	Typ.
Overall mass	3.5	4.2	4.5	5.2	5.7	6.8	kg	Typ.
Guide type	Air bearing	Air bearing	Air bearing	Air bearing	Air bearing	Air bearing

Drive properties	A-121	Unit	Tolerance
Drive type	Ironless 3-phase linear motor
Intermediate circuit voltage, RMS	48, nominal 80, max.	V DC
Peak current, RMS	3.5	A	Max.
Nominal current, RMS	1.2	A	Max.
Peak force	33.2	N	Max.
Nominal force	11.1	N	Max.
Force constant, RMS	9.4	N/A	Typ.
Resistance phase-phase	6.3	Ω	Typ.
Inductance phase-phase	1.0	mH	Typ.
Back EMF phase-phase	7.7	V·s/m	Typ.
Cabling	External, moving cable

Positioning	A-121.xxxA	A-121.xxxB
Integrated sensor	Incremental linear encoder	Absolute linear encoder
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period	BiSS-C
Sensor resolution	4.88 nm ⁽³⁾	1 nm
Bidirectional repeatability	±0.25 µm	±0.25 µm
Positioning accuracy, uncalibrated ⁽⁴⁾	A-121.050: ± 1.5 µm A-121.100: ± 1.5 µm A-121.150: ± 1.5 µm A-121.200: ± 2.0 µm A-121.250: ± 2.0 µm A-121.350: ± 3.0 µm	A-121.050: ± 1.5 µm A-121.100: ± 1.5 µm A-121.150: ± 1.5 µm A-121.200: ± 1.5 µm A-121.250: ± 1.5 µm A-121.350: ± 1.5 µm
Positioning accuracy, calibrated ⁽⁴⁾	A-121.050: ± 0.5 µm A-121.100: ± 0.5 µm A-121.150: ± 0.5 µm A-121.200: ± 0.5 µm A-121.250: ± 0.5 µm A-121.350: ± 0.5 µm	A-121.050: ± 0.5 µm A-121.100: ± 0.5 µm A-121.150: ± 0.5 µm A-121.200: ± 0.5 µm A-121.250: ± 0.5 µm A-121.350: ± 0.5 µm

Miscellaneous	A-121
Operating pressure ⁽⁵⁾	65 to 75 psi (450 to 520 kPa)
Air consumption	< 1.0 SCFM (28 SLPM)
Air quality	Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3
Materials	Hardcoat aluminum, stainless steel mounting hardware

⁽¹⁾ Dependent on the flatness of the surface, on which the stage is mounted.

⁽²⁾ Can be limited by the payload, controller or drive.

⁽³⁾ Assumes 4096x interpolation. Contact PI for the use of other factors.

⁽⁴⁾ Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.

⁽⁵⁾ To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

⁽⁶⁾ Assumes an air bearing operating pressure of 70 psi (480 kPa).

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Product Note

Product Change Notification A-xxx.*C1

Version / Date

2018-08-02

Document language English

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pdf - 71 KB

Datasheet

Datasheet A-121

Version / Date

2021-04-27

Version / Date

2021-04-27

Version / Date

2021-04-27

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

Download

pdf - 714 KB

Documentation

User Manual A121D0001

A-121 PIglide AT1 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback

Version / Date

2021-05-17

Document language English

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3-D Models

A-121 3-D model

Version / Date

2018-03-15

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Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

A-121.050A1

PIglide AT1 Linear stage, air bearing, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-121.050B1

PIglide AT1 Linear stage, air bearing, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-121.100A1

PIglide AT1 Linear stage, air bearing, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-121.100B1

PIglide AT1 Linear stage, air bearing, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-121.150A1

PIglide AT1 Linear stage, air bearing, 150 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-121.150B1

PIglide AT1 Linear stage, air bearing, 150 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-121.200A1

PIglide AT1 Linear stage, air bearing, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-121.200B1

PIglide AT1 Linear stage, air bearing, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-121.250A1

PIglide AT1 Linear stage, air bearing, 250 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-121.250B1

PIglide AT1 Linear stage, air bearing, 250 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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A-121.350A1

PIglide AT1 Linear stage, air bearing, 350 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V

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A-121.350B1

PIglide AT1 Linear stage, air bearing, 350 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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