A-121 PIglide AT1 Linear Stage with Air Bearings
High Performance Small Footprint Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 115 mm × 115 mm
- Travel ranges to 350 mm
- Low profile from 60 mm
- Resolution to 1 nm
Product overview
The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation.
Accessories and options
- Encoder
- PIglide filter and air preparation kits
- Multi-axis motion controller and direct drives
- XY setups and individual configurations
- Cable track variations
- Counterbalance options for vertical assembly
- Base plates made of granite and systems for reducing vibration
Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
Specifications
Specifications
Motion | A-121.050 | A-121.100 | A-121.150 | A-121.200 | A-121.250 | A-121.350 | Unit | Tolerance |
---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | ||
Travel range | 50 | 100 | 150 | 200 | 250 | 350 | mm | |
Pitch / yaw (1) | 20 | 20 | 20 | 20 | 25 | 35 | µrad | Max. |
Straightness / flatness (1) | 0.5 | 0.5 | 1 | 1.5 | 2 | 2.5 | µm | Max. |
Straightness / flatness per 25 mm travel range (1) | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | µm | Max. |
Velocity, unloaded (2) | 0.5 | 1 | 1 | 1 | 1 | 1 | m/s | Max. |
Acceleration, unloaded (2) | 20 | 20 | 20 | 20 | 20 | 20 | m/s² | Max. |
Mechanical properties | A-121.050 | A-121.100 | A-121.150 | A-121.200 | A-121.250 | A-121.350 | Unit | Tolerance |
---|---|---|---|---|---|---|---|---|
Load capacity in z (6) | 100 | 100 | 100 | 100 | 100 | 100 | N | Max. |
Load capacity in y (6) | 40 | 40 | 40 | 40 | 40 | 40 | N | Max. |
Permissible torque in θx (6) | 5 | 5 | 5 | 5 | 5 | 5 | Nm | Max. |
Permissible torque in θy (6) | 8.3 | 8.3 | 8.3 | 8.3 | 8.3 | 8.3 | Nm | Max. |
Moved mass | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | kg | Typ. |
Overall mass | 3.5 | 4.2 | 4.5 | 5.2 | 5.7 | 6.8 | kg | Typ. |
Guide type | Air bearing | Air bearing | Air bearing | Air bearing | Air bearing | Air bearing |
Drive properties | A-121 | Unit | Tolerance |
---|---|---|---|
Drive type | Ironless 3-phase linear motor | ||
Intermediate circuit voltage, RMS | 48, nominal 80, max. | V DC | |
Peak current, RMS | 3.5 | A | Max. |
Nominal current, RMS | 1.2 | A | Max. |
Peak force | 33.2 | N | Max. |
Nominal force | 11.1 | N | Max. |
Force constant, RMS | 9.4 | N/A | Typ. |
Resistance phase-phase | 6.3 | Ω | Typ. |
Inductance phase-phase | 1.0 | mH | Typ. |
Back EMF phase-phase | 7.7 | V·s/m | Typ. |
Cabling | External, moving cable |
Positioning | A-121.xxxA | A-121.xxxB |
---|---|---|
Integrated sensor | Incremental linear encoder | Absolute linear encoder |
Sensor signal | Sin/cos, 1 V peak-peak, 20 µm signal period | BiSS-C |
Sensor resolution | 4.88 nm (3) | 1 nm |
Bidirectional repeatability | ±0.25 µm | ±0.25 µm |
Positioning accuracy, uncalibrated (4) | A-121.050: ± 1.5 µm A-121.100: ± 1.5 µm A-121.150: ± 1.5 µm A-121.200: ± 2.0 µm A-121.250: ± 2.0 µm A-121.350: ± 3.0 µm | A-121.050: ± 1.5 µm A-121.100: ± 1.5 µm A-121.150: ± 1.5 µm A-121.200: ± 1.5 µm A-121.250: ± 1.5 µm A-121.350: ± 1.5 µm |
Positioning accuracy, calibrated (4) | A-121.050: ± 0.5 µm A-121.100: ± 0.5 µm A-121.150: ± 0.5 µm A-121.200: ± 0.5 µm A-121.250: ± 0.5 µm A-121.350: ± 0.5 µm | A-121.050: ± 0.5 µm A-121.100: ± 0.5 µm A-121.150: ± 0.5 µm A-121.200: ± 0.5 µm A-121.250: ± 0.5 µm A-121.350: ± 0.5 µm |
Miscellaneous | A-121 |
---|---|
Operating pressure (5) | 65 to 75 psi (450 to 520 kPa) |
Air consumption | < 1.0 SCFM (28 SLPM) |
Air quality | Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3 |
Materials | Hardcoat aluminum, stainless steel mounting hardware |
Downloads
Datasheet
Documentation
User Manual A121D0001
A-121 PIglide AT1 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
3-D Models
A-121 3-D model
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