LMS-180 Precision Linear Stage

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

LMS-180 Precision Linear Stage
Product Description Specifications Downloads Quote / Order
  • Travel ranges to 508 mm (20")
  • Velocity to 500 mm/s
  • Incremental encoder with 15 nm resolution

Reference-class linear stage

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo or stepper motors are available with the same footprint.

 

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Fields of application

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

Specifications

Datasheet LMS-180

Version / Date
2017-04-19
Version / Date
2017-04-19
Version / Date
2017-08-08
Document language
pdf - 656 KB
pdf - 660 KB
pdf - 737 KB

Downloads

Datasheet

Datasheet LMS-180

Version / Date
2017-04-19
Version / Date
2017-04-19
Version / Date
2017-08-08
Document language
pdf - 656 KB
pdf - 660 KB
pdf - 737 KB

Documentation

User Manual LMS-180

Precision Linear Stage
Version / Date
MAN_LMS-180_9_EN_01.PDF
Version / Date
2017-04-21
Document language
pdf - 925 KB
pdf - 930 KB

3-D Models

LMS-180 STEP

Version / Date
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zip - 11 MB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.