A-121 PIglide AT1 Linear Stage with Air Bearings

High Performance Small Footprint Nanopositioning Stage

A-121 PIglide AT1 Linear Stage with Air Bearings
Product Description Specifications Downloads Quote / Order
  • Ideal for scanning applications or high-precision positioning
  • Cleanroom compatible
  • Size of the motion platform 115 mm × 115 mm
  • Travel ranges to 350 mm
  • Low profile from 60 mm
  • Resolution to 1 nm

Product overview

The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation.

Accessories and options

  • Encoder
  • PIglide filter and air preparation kits
  • Multi-axis motion controller and direct drives
  • XY setups and individual configurations
  • Cable track variations
  • Counterbalance options for vertical assembly
  • Base plates made of granite and systems for reducing vibration

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet A-121

Version / Date
2018-07-27
Version / Date
2018-07-27
Version / Date
2018-08-16
Document language
pdf - 657 KB
pdf - 667 KB
pdf - 775 KB

Downloads

Product Note

Product Change Notification A-xxx.*C1

Version / Date
2018-08-02
Document language English
pdf - 71 KB

Datasheet

Datasheet A-121

Version / Date
2018-07-27
Version / Date
2018-07-27
Version / Date
2018-08-16
Document language
pdf - 657 KB
pdf - 667 KB
pdf - 775 KB

Documentation

User Manual A121D0001

A-121 PIglide AT1 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
Version / Date
2016-12-02
Document language English
pdf - 1 MB

3-D Models

A-121 3-D model

Version / Date
2018-03-15

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

A-121.050A1
PIglide AT1 linear stage, air bearing, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.050B1
PIglide AT1 linear stage, air bearing, 50 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.100A1
PIglide AT1 linear stage, air bearing, 100 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.100B1
PIglide AT1 linear stage, air bearing, 100 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.150A1
PIglide AT1 linear stage, air bearing, 150 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.150B1
PIglide AT1 linear stage, air bearing, 150 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.200A1
PIglide AT1 linear stage, air bearing, 200 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.200B1
PIglide AT1 linear stage, air bearing, 200 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.250A1
PIglide AT1 linear stage, air bearing, 250 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.250B1
PIglide AT1 linear stage, air bearing, 250 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V
A-121.350A1
PIglide AT1 linear stage, air bearing, 350 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V
A-121.350B1
PIglide AT1 linear stage, air bearing, 350 mm travel range, absolute linear encoder with BiSS-C signal transmission, 1 nm sensor resolution, ironless 3-phase linear motor, 48 V

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