P-753 LISA Linear Actuator and Stage

Dynamic and Stable in Position

P-753 LISA Linear Actuator and Stage
Product Description Specifications Downloads Quote / Order
  • Guided stage and actuator at the same time
  • Travel range to 38 µm
  • Resolution 0.05 nm
  • Nonmagnetic versions available
  • Particularly fast response behavior due to direct drive
  • Highest linearity due to capacitive sensors

Fields of application

  • Scanning microscopy
  • Measuring technology
  • Test procedures and quality assurance
  • Photonics
  • Fiber positioning

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Higher stiffness and dynamics due to PICMA® direct drive

Piezo nanopositioners with PICMA® direct drive have no mechanical translation. This allows fast response speeds as well as the highest possible stiffness and dynamics in the piezo drive range.

Specifications

Datasheet P-753

Version / Date
2018-04-16
Version / Date
2018-04-13
Document language
pdf - 836 KB
pdf - 692 KB

Downloads

Datasheet

Datasheet P-753

Version / Date
2018-04-16
Version / Date
2018-04-13
Document language
pdf - 836 KB
pdf - 692 KB

Documentation

User Manual PZ254

P-753 LISA High-Dynamics Piezo Nanopositioning Systems
Version / Date
2014-10-13
Version / Date
2014-10-13
Document language
pdf - 925 KB
pdf - 891 KB

3-D Models

P-753 STEP

zip - 415 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Versions with Sub-D connector (m)

Versions with LEMO connector

Linear positioners, vacuum compatible to 10-9 hPa