N-216 NEXLINE® Linear Actuator

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

N-216 NEXLINE® Linear Actuator
Product Description Specifications Downloads Quote / Order

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Specifications

Datasheet N-216

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-16
Document language
pdf - 713 KB
pdf - 722 KB
pdf - 2 MB

Downloads

Datasheet

Datasheet N-216

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-16
Document language
pdf - 713 KB
pdf - 722 KB
pdf - 2 MB

Documentation

User Manual N216T0013

N-216.101, .1A1, .201, .2A1 NEXLINE® Piezo Stepping High-Load Actuators
Version / Date
2017-07-20
Document language English
pdf - 1 MB

3-D Models

N-216 STEP

Document language English
zip - 225 KB

Quote / Order

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