P-853 • P-854 Piezoelectric Micrometer Screw

Integrated Piezo Drive with Subnanometer Resolution

Travel ranges to 18 mm
Piezo fine travel range to 25 µm
Subnanometer resolution
Dynamic operation to 10 Hz
Alternative for standard micrometer screws

P-853, dimensions in mm

P-854, dimensions in mm

Laboratory automation
Automatic alignment for optics

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Download datasheet Go to specifications

Datasheet

Version / Date

2019-11-15

pdf - 487 KB

Version / Date

2019-11-15

pdf - 487 KB

Version / Date

2021-01-26

pdf - 333 KB

Download

	P-853.00	P-854.00	Unit	Tolerance
Travel range (micrometer screw)	6	18	mm
Piezo fine travel range, at 0 to 100 V	25	25	µm	±20 %
Min. incremental motion (piezo drive)	<1	<1	nm
Manual sensitivity (micrometer screw)	1	1	µm
Axial pull force capacity	10	20	N	max.
Axial push force capacity	5	5	N	max.
Micrometer screw	M-619.10	M-626.10
Drive screw pitch	0.5	0.5	mm/rev.
Stiffness	1	1.5	N/µm
Electrical capacitance (PZT)	0.45	1.5	µF
Electrical connection	LEMO FFA.00.250, male Coaxial cable RG 178, PTFE insulated, 1 m	LEMO FFA.00.250, male Coaxial cable RG 178, PTFE insulated, 1 m
Mass	0.05	0.1	kg
Housing material	Nonmagnetic stainless steel	Nonmagnetic stainless steel
Recommended electronics	E-610, E-836	E-610, E-836

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

Download datasheet Go to download

Datasheet

Version / Date

2019-11-15

pdf - 487 KB

Version / Date

2019-11-15

pdf - 487 KB

Version / Date

2021-01-26

pdf - 333 KB

Download

Documentation

P-853 / P-854 Piezoelectric micrometer screw

Version / Date

2021-05-05

pdf - 720 KB

English

3-D Models

zip - 233 KB

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P-853.00

PiezoMike hybrid drive, 6 mm, 25 µm

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P-854.00

PiezoMike hybrid drive, 18 mm, 25 µm

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