P-853 • P-854 Piezoelectric Micrometer Screw
Integrated Piezo Drive with Subnanometer Resolution
- Travel ranges to 18 mm
- Piezo fine travel range to 25 µm
- Subnanometer resolution
- Dynamic operation to 10 Hz
- Alternative for standard micrometer screws
Application fields
- Laboratory automation
- Automatic alignment for optics
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Specifications
Specifications
P-853.00 | P-854.00 | Unit | Tolerance | |
---|---|---|---|---|
Travel range (micrometer screw) | 6 | 18 | mm | |
Piezo fine travel range, at 0 to 100 V | 25 | 25 | µm | ±20 % |
Min. incremental motion (piezo drive) | <1 | <1 | nm | |
Manual sensitivity (micrometer screw) | 1 | 1 | µm | |
Axial pull force capacity | 10 | 20 | N | max. |
Axial push force capacity | 5 | 5 | N | max. |
Micrometer screw | M-619.10 | M-626.10 | ||
Drive screw pitch | 0.5 | 0.5 | mm/rev. | |
Stiffness | 1 | 1.5 | N/µm | |
Electrical capacitance (PZT) | 0.45 | 1.5 | µF | |
Electrical connection | LEMO FFA.00.250, male Coaxial cable RG 178, PTFE insulated, 1 m | LEMO FFA.00.250, male Coaxial cable RG 178, PTFE insulated, 1 m | ||
Mass | 0.05 | 0.1 | kg | |
Housing material | Nonmagnetic stainless steel | Nonmagnetic stainless steel | ||
Recommended electronics | E-610, E-836 | E-610, E-836 |
Downloads
Datasheet
Documentation
User Manual P853M0001
P-853 / P-854 Piezoelectric micrometer screw
3-D Models
3-D-model P-85x.00
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.