NEW

A-63x PIglide RL Low-Profile Rotation Stage with Air Bearing

Friction-Free, Motorized

A-63x PIglide RL Low-Profile Rotation Stage with Air Bearing
Product Description Specifications Downloads Quote / Order
  • 200 mm or 300 mm motion platform diameter
  • Low profile, 60 mm
  • Eccentricity and flatness < 100 nm
  • Option for self-locking at rest by magnetic preload

Product Overview

The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design.

Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.

The RL stages offer superior travel accuracy, flatness, and wobble performance.

3-phase torque motor

  • Brushless
  • Slotless
  • Low cogging torque

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Accessories and options

  • Incremental or absolute encoder
  • Vacuum feedthrough
  • Self-locking at rest by magnetic preload
  • PIglide filter and air preparation kit
  • Single or multi-axis motion controllers and servo drives
  • Multi-axis/customized designs
  • Base plates made of granite and systems for reducing vibration

Application fields

Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet A-63x

Version / Date
2018-01-17
Document language
pdf - 740 KB
pdf - 749 KB

Downloads

Datasheet

Datasheet A-63x

Version / Date
2018-01-17
Document language
pdf - 740 KB
pdf - 749 KB

Documentation

User Manual A630D0001

A-63x Series Low Profile Rotary Air Bearing Stage PIglide RL, Direct-drive Torque Motor Driven with Encoder Feedback
Version / Date
1.0 2018-03-02
Document language English
pdf - 1 MB

3-D Models

A-63x 3-D model

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

A-635.A100 NEW!
PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, 31488 lines/revolution, slotless, brushless 3-phase torque motor
A-635.B100 NEW!
PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, 0.0015 μrad sensor resolution, slotless, brushless 3-phase torque motor
A-637.A100 NEW!
PIglide RL rotation stage, air bearing, 300 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, 47200 lines/revolution, slotless, brushless 3-phase torque motor
A-637.B100 NEW!
PIglide RL rotation stage, air bearing, 300 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, 0.0015 μrad sensor resolution, slotless, brushless 3-phase torque motor

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