PI capacitive (capacitance) sensors are the metrology system of choice for the most demanding nanopositioning applications. They are absolute-measuring, high-dynamics devices. PI capacitive sensors / control electronics use a high-frequency AC excitation signal for enhanced bandwidth and drift-free measurement stability (subnanometer stability over several hours, see Fig. 6, on Link).
Last Updated on Wednesday, 06 July 2011 15:26
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P-876 DuraAct™ patch transducers offer the functionality of piezoceramic materials as sensors and actuators as well as for electrical charge generation and storage. Used as bender actuators, they allow high deflections of up to 0.8 mm with high force and high precision.
Last Updated on Wednesday, 06 July 2011 15:27
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