M-682 translation stages are low-profile, high-accuracy positioning systems based on the M-674 RodDrive ultrasonic linear motor actuator. The M-682 positioner combines the advantages of its high-performance, high-speed drive with a high-precision guiding system and the superior accuracy of a direct-metrology linear encoder providing 0.1 µm resolution.
- Integration of the Powerful PILine® RodDrive
- Low Profile, Compact Dimensions
- Max. Velocity 350 mm/s
- Up to 7 N Pushing Force
- Direct Metrology Linear Encoder, 0.1 µm Resolution
- Non-Magnetic and Vacuum-Compatible Versions Available
M-682 PILine® Linear Motor Stage
In addition to the standard, 50 mm model, custom M-682 versions with different travel ranges as well as vacuumcompatible and non-magnetic designs are feasible and available on request.
RodDrive Replaces Classical Motor/Leadscrew Systems
The M-862 is an example of how an M-674 RodDrive linear motor actuator can beemployed to design a very compact positioning system. The RodDrive represents ahigher level of integration than OEM piezo motors motors such as the P-664 and significantly simplifies the stage design because preloading and alignment of motor and friction bar are taken care of inside the actuator.
Advantages of PILine® Micropositioning Systems
The ultrasonic piezoceramic drives used in PILine® micropositioners have a number of advantages over classical drives:
- Higher Accelerations, up to 10g
- Speeds up to 500 mm/s
- Small Form Factor
- Self-Locking When Powered Down
- No Shafts, Gears or Other Rotating Parts
- Non-Magnetic and Vacuum Compatible Drive Principle
Optimized Controller and Drive Electronics
PILine® motors require a special drive electronics to generate the ultrasonic oscillations for piezoceramic element. For optimum performance the highly specialized C-866 motion controller is recommended. This sophisticated controller also integrates the drive electronics. Furthermore, the controller has a number of special features, including dynamic parameter switching for anoptimized high-speed motion and settling behavior to take into account the motion characteristics typical of piezomotors. The broad-band encoder input (35 MHz) supports the outstanding high accelerations and velocities of PILine®drives at high resolutions.
Optionally, for use with third party servo controllers, the C-185 analog drive electronic (stand-alone unit) is available. It controls the motor speed byan analog ±10 V signal. For optimum performance this driver must be tuned together with the stage and should be ordered at the same time as the motor/stage.
Notes
The products described in this document are in part protected by the following patents: US Pat. No. 6,765,335 / German Patent No. 10154526
| Model | M-682.174 |
| Active axes | XY |
| Motion and positioning | |
| Travel range | 50 mm |
| Integrated sensor | Linear encoder |
| Sensor resolution | 0.1 µm |
| Design resolution | 0.1 µm typ. |
| Min. incremental motion | 0.1 µm typ. |
| Bidirectional repeatability | ±0.2 µm typ. |
| Unidirectional repeatability | 0.2 µm typ. |
| Pitch | ±50 µrad typ. |
| Yaw | ±50 µrad typ. |
| Max. speed | 350 mm/s |
| Reference switch repeatability | 1 µm typ. |
| Mechanical properties | |
| Max. load | 50 N |
| Max. push/pull force | 7 N |
| Max. Holding force | 7 N |
| Drive properties | |
| Motor type | M-674 RodDrive PILine® ultrasonic piezomotor |
| Operating voltage | 200 V (Peak-Peak)*, 70 V (RMS)* |
| Electrical power | 15 W** nominal |
| Current | 1.5 A** |
| Limit and reference switches | Hall-effect |
| Miscellaneous | |
| Operating temperature range | -20 to +50 °C |
| Material | Al (black anodized) |
| Dimensions | 110 x 110 x 20 mm |
| Mass | 0.57 kg ±5% |
| Cable length | 1.5 m ±10 mm |
| Connector | MDR, 14-pin |
| Recommended controller/driver | C-867.D64 Single-axis Controller / Driver, C-185.D64 driver |
*Motor power is supplied by the drive electronics, which runs on 12 VDC
**For drive electronics