PI offers a wide variety of piezo based solutions from long-life PZT ceramics for vibration cancellation to the ultra-high-performance NEXLINE® long-travel nanopositioning piezo motors.
PI's capacitive nanometrology sensors measure motion down to the sub-nanometer range with very high bandwidth.
Wafer and mask focus control and levelling
- Piezo driven multiaxis flexure stages with nanometre resolution
- Digital controllers with dynamic linearisation and automated diagnostics
Active vibration cancellation
- High load piezo actuators
- High power voltage amplifiers and controllers
Nanoimprint & lithography
- Six axis (three linear, three rotary) piezo stages with nanometre resolution
- NexLine piezo walk drive with millimetre travel and sub nanometre resolution for high load alignment
- PIFOC nanofocusing piezo objective positioner