PI precision positioning stages and actuators have been used in many noncontacting optical inspection and contacting nanometrology applications. They provide sub-nanometer precision and extremely uniform motion.
PI's capacitive nanometrology sensors measure motion down to the sub-nanometer range with very high bandwidth.
Scanning interferometry including white light
- Piezo driven objective scanners (PIFOC) for high precision & fast step and settle
- Piezo driven Z stages for sample movement
- Hybrid stages for long travel (mm) and nanometre level resolution to measure large samples
Testing materials and processes at the nanoscale
- Piezo actuators for active mirror focus control
- X, XY and XYZ piezo stages for nanometre position control of samples and probes
- Capacitive sensors for sub nanometre position measurement
Ellipsometry
- Rotation stages from 25mm diameter to 120mm diameter for position resolution down to microradians
Sample positioning and alignment
- Linear and rotation stages with DC or Stepper motor drives, sub micron resolution
- Precise multiaxis alignment solutions using hexapods or stacked assemblies